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US 7,071,603 B2Granted
Patterned seed layer suitable for electron-emitting device, and associated fabrication method
AssigneecDream Corporation
InventorsChang Chul Ha, Son Jong Woo, Kim Jung Jae
Life of this patent
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Abstract
An electron-emitting device contains an emitter seed layer patterned into multiple laterally separated sections situated between the electron-emissive elements, on one hand, and emitter electrodes, on the other hand. Sections of the seed layer are spaced apart along each emitter electrode to electrically decouple electron emission elements disposed on the seed layer.
Claims20
A device comprising:
- an emitter electrode;
- a resistor layer;
- an electrically conductive seed layer overlying part of the resistor layer, the seed layer including a plurality of laterally separated unconnected sections;
- a dielectric layer overlying the resistive layer;
- a gate electrode overlying the dielectric layer above the resistive layer and having lateral edges in approximate vertical alignment with lateral edges of the dielectric layer;
- and
- a plurality of carbon based electron-emissive elements (a) positioned over the sections of the seed layer above the emitter electrode and (b) situated in a composite opening extending through the gate electrode and the dielectric layer.
4 more elements
A device comprising:
- an emitter electrode;
- an electrically resistive layer overlying at least a portion of the emitter electrode;
- a dielectric layer overlying the resistive layer;
- a plurality of laterally separated gate electrodes overlying the dielectric layer above the resistive layer;
- and
- for each gate electrode, a multiplicity of electron-emissive elements (a) grown from a seed layer that includes a plurality of unconnected sections above the emitter electrode and (b) situated in composite openings extending through the gate electrode and the dielectric layer.
3 more elements
An electron-emitting device comprising:
- an emitter electrode;
- a gate electrode;
- a plurality of groups of electron-emissive elements situated in one or more openings in the gate electrode;
- and
- a seed layer including at least two laterally separated unconnected sections, each section of the seed layer electrically coupled between one or more of the plurality of groups of electron-emissive elements and the emitter electrode.
2 more elements
Dependencies are inferred from the claim text.