Semiconductor device having a Damascene gate or a replacing gate
AssigneeSanyo Electric Co., Ltd.
InventorsKazuhiro Miyagawa, Mitsuo Yasuhira, Yasushi Akasaka, Isamu Nishimura
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Abstract
A semiconductor device includes semiconductor elements and at least one dummy pattern. Each or at least some of the semiconductor elements has a Damascene gate structure or a replacing gate structure and is located in element-forming regions. In addition, at least a dummy pattern is located in a region different from the element-forming regions. The dummy pattern may have a semiconductor element structure of the same or different kind from the Damascene gate structure or replacing gate structure. The dummy pattern may be a pattern of an insulating film, an interface transistor, or an analog circuit capacitor electrode instead of the dummy gate.
Claims2
A semiconductor device comprising:
- a plurality of semiconductor elements located in element-forming regions of a semiconductor substrate, said semiconductor elements having a Damascene gate structure or a replacing gate structure;
- and
- a dummy pattern located in a region other than said element-forming regions, said dummy pattern having a gate structure made of materials different from the materials of said Damascene gate structure and said replacing gate structure.
Dependencies are inferred from the claim text.