Nonvolatile semiconductor memory device having adjacent selection transistors connected together
AssigneeKabushiki Kaisha Toshiba
InventorsMakoto Sakuma, Fumitaka Arai
Life of this patent
Estimating the term…
Loading patent…
AssigneeKabushiki Kaisha Toshiba
InventorsMakoto Sakuma, Fumitaka Arai
Estimating the term…
A semiconductor memory device comprising a semiconductor substrate, a plurality of cell transistors provided on the substrate, a plurality of selection gates provided on the substrate, and element-isolation regions provided between the cell transistors and between the selection gates. Each cell transistor has a floating gate provided on a gate insulating film provided on the substrate, a source and drain provided in the substrate and aligned with the sides of the floating gate, an inter-gate insulating film provided on one side of the floating gate, and a control gate provided on the inter-gate insulating film and laying over the one side of the floating gate. The selection gates are connected by conductive members which are provided on the gate insulating film and embedded in the selection gates.
A nonvolatile semiconductor memory device comprising:
Dependencies are inferred from the claim text.