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US 7,071,492 B2Granted
Thermo-optical device
AssigneeIntel Corporation
InventorsRuolin Li, Ut Tran
Life of this patent
Estimating the term…
Abstract
A polymer well may be formed over a thermal oxide formed over a semiconductor substrate in one embodiment. The well may include a waveguide and a pair of heaters adjacent the waveguide. Each heater may be mounted on a platform of insulating material to reduce heat loss through the substrate and the thermal oxide, in one embodiment.
Claims20
A thermo-optic device comprising:
- a structure;
- a cladding over the structure;
- a polymer well formed in said cladding;
- a waveguide formed in said well;
- an insulating platform formed in said well on the structure;
- and
- a heater on said platform.
4 more elements
A thermo-optic device comprising:
- a semiconductor substrate;
- a waveguide on said substrate;
- a thermally insulating platform on said substrate;
- a heater formed on said platform;
- and
- an insulating material over said heater.
3 more elements
Dependencies are inferred from the claim text.