Reduction of oxides in a fluid-based switch
AssigneeAgilent Technologies, Inc.
InventorJohn Ralph Lindsey
Life of this patent
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Abstract
In one embodiment, a switch includes first and second mated substrates defining therebetween a number of cavities. A plurality of wettable elements are exposed within one or more of the cavities. A switching fluid is held within one or more of the cavities. The switching fluid serves to connect and disconnect at least a pair of the plurality of wettable elements in response to forces that are applied to the switching fluid. A gas is also held within one or more of the cavities. The gas is provided to react with oxides on or in the cavities. An actuating fluid is held within one or more of the cavities and applies the forces to the switching fluid. Methods of making such a switch are also disclosed.
Claims24
A method, comprising:
- in an environment having a low partial pressure of oxygen, wherein the low partial pressure of oxygen is at or below a critical limit to reduce formation of oxides:
- i) depositing a switching fluid on a first substrate;
- and
- ii) mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.
A method, comprising:
- in an environment containing a gas, other than oxygen, to reduce formation of oxides:
- i) depositing a switching fluid on a first substrate;
- ii) mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.
A method, comprising:
- depositing a switching fluid on a first substrate;
- mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states;
- and
- creating a gas in the cavity holding the switching fluid, the gas to react with oxygen or oxides within the cavity.
A method, comprising:
- depositing a switching fluid on a first substrate;
- mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states;
- and
- injecting a gas into the cavity, the gas to react with oxygen or oxides within the cavity.
A method of reducing oxides in a switch, comprising:
- depositing a switching fluid on a first substrate;
- mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states, and the cavity being connected to a gas supply channel extending from within to outside the cavity;
- and
- in an environment containing a controlled pressure of one or more gases, hermetically sealing the switch, including the gas supply channel, to trap a desired pressure of the one or more gases in the cavity.
A switch, comprising:
- first and second mated substrates defining therebetween a number of cavities;
- a plurality of wettable elements exposed within one or more of the cavities;
- a switching fluid, held within one or more of the cavities, that serves to connect and disconnect at least a pair of the plurality of wettable elements in response to forces that are applied to the switching fluid;
- a gas, held within one or more of the cavities, to react with oxygen or oxides on or in the cavities;
- and
- an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.
Dependencies are inferred from the claim text.