Electronically latching micro-magnetic switches and method of operating same
AssigneeArizona State University
InventorsMeichun Ruan, Jun Shen, Charles Wheeler
Life of this patent
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Abstract
A switch with an open state and a closed state suitably includes a cantilever having first and second states corresponding to the open and closed states of the switch, respectively. The switch may also include a magnet configured to provide an electromagnetic field that maintains said cantilever in one of the first and second states. Various embodiments may also include an electrode or electrical conductor configured to provide an electric potential or electromagnetic pulse, as appropriate, to switch the cantilever between the first and second states. Various embodiments may be formulated with micromachining technologies, and may be formed on a substrate.
Claims26
An electrostatic actuated micro-switch having an electrically open state and an electrically closed state, comprising:
- a substrate;
- a catilever disposed over the substrate and having first and second physical positions corresponding to the electrically open and electrically closed states of the micor-switch;
- a permanent magnet disposed under the substrate substantially along the length of the cantilever for maintaining the cantilever in one of the first and second physical positions;
- and
- first and second electrodes disposed over the substrate and spaced apart with respect to opposite portions of the cantilever, while being mechanically isolated from the cantilever, the first electrode providing a first electrical potential with respect to the cantilever to cause the cantilever to move in response to electrostatic forces arising from the first electrical potential to the first physical position corresponding to the electrically open state of the micro- switch, the second electrode providing a second electrical potential with respect to the cantilever to cause the cantilever to move in response to electrostatic forces arising from the second electrical potential to the second physical position corresponding to the electrically closed state of the micro-switch.
An electrostatic actuated micro-switch, comprising:
- a substrate;
- a cantilever having a main body disposed over the substrate, the cantilever having first and second physical positions corresponding to open and closed states of the micro-switch;
- a magnet disposed under the substrate so as to magnetically influence the main body of the cantilever and maintain the cantilever in the first or second physical position;
- and
- first and second electrodes disposed over the substrate and spaced apart with respect to opposite sides of the cantilever, the first electrode providing a first electrical potential with respect ot the cantilever to cause the cantilever to move in response to electrostatic forces arising from the first electrical potential to the first physical position corresponding to the open state of the micr-switch, the second electrode providing a second electrical potential with respect to the cantilever to cuase the cantilever to move in response to electrostatic forces arising from the second electrical potential to the second physical position corresponding to the closed state of the micro-switch.
- 9.The electrostatic actuated micro-switch of claim 8, further including an electrical contact disposed over the substrate for making physical contact with the cantilever.
The electrostatic actuated micro-switch of claim 9, further including an insulating layer between the substrate and the electrical contact.
An electrostatic actuated micro-switch, comprising:
- a substrate;
- a cantilever having a main body disposed over the substrate;
- a magnet placed in proximity to the cantilever so as to magnetically influence the main body of the cantilever and maintain the cantilever in a first or second physical position;
- and
- a first electrode placed in proximity to the cantilever for providing a first electrical potential with respect to the cantilever to cause the cantilever to move in response to electrostatic forces arising from the first electrical potential to the first physical position corresponding to an open state of the micro-switch.
A method of making an electrostatic actuated micro-switch, comprising:
- providing a substrate;
- providing a cantilever having a main body disposed over the substrate;
- providing a magnet in proximity to the cantilever so as to magnetically influence the main body of the cantilever and maintain the cantilever in a first or second physical position;
- and
- providing a first electrode in proximity to the cantilever for providing a first electrical potential with respect to the cantilever to cause the cantilever to move in response to electrostatic forces arising from the first electrical potential to the first physical position corresponding to an open state of the micro-switch.
Dependencies are inferred from the claim text.