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US 7,071,121 B2Granted
Patterned ceramic films and method for producing the same
AssigneeHewlett-Packard Development Company, L.P.
InventorsDavid Punsalan, Dennis M. Lazaroff, Christopher C. Beatty
Life of this patent
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Abstract
A ceramic film is useful as ion-conducting ceramics, electrodes, hard ceramic coatings, transparent conducting oxides, transparent semiconducting oxides, ferroelectric oxides, and dielectric oxides. The ceramic film may be produced from a liquid precursor solution.
Claims55
A method of making a patterned ceramic film, comprising:
- depositing a liquid precursor solution onto a substrate, thereby forming a liquid film, the liquid precursor solution having at least one soluble metal salt dissolved into a photoresist;
- patterning the liquid film;
- and
- heating the patterned liquid film, thereby producing the patterned ceramic film;
- wherein the patterned ceramic film is adapted for use as at least one of ion-conducting ceramics, electrodes, hard ceramic coatings, transparent conducting oxides, transparent semiconducting oxides, ferroelectric oxides, or dielectric oxides.
2 more elements
A fuel cell, comprising:
- at least one electrode operatively disposed in the fuel cell;
- and
- an electrolyte in electrochemical contact with the at least one electrode;
- wherein at least one of the electrode or the electrolyte comprises a patterned ceramic film produced by the process comprising:
- depositing a liquid precursor solution onto a substrate, thereby forming a liquid film, the liquid precursor solution having at least one soluble metal salt dissolved into a photoresist;
- patterning the liquid film;
- and
- heating the patterned liquid film, thereby producing the patterned ceramic film.
5 more elements
A method of using a patterned ceramic film, the patterned ceramic film having been formed by a process comprising:
- depositing a liquid precursor solution onto a substrate, thereby forming a liquid film, the liquid precursor solution having at least one soluble metal salt dissolved into a photoresist;
- patterning the liquid film;
- and
- heating the patterned liquid film, thereby producing the patterned ceramic film;
- wherein the method of using the patterned ceramic film comprises operatively disposing the patterned ceramic film in a device, wherein the patterned ceramic film is at least one of an ion-conducting ceramic, an electrode, a hard ceramic coating, a transparent conducting oxide, a transparent semiconducting oxide, a ferroelectric oxide, or a dielectric oxide.
2 more elements
A method of using a fuel cell, comprising:
- operatively connecting the fuel cell to a load, wherein the fuel cell comprises at least one of an electrode or an electrolyte comprising a patterned ceramic film formed by a process comprising:
- depositing a liquid precursor solution onto a substrate, thereby forming a liquid film, the liquid precursor solution having at least one soluble metal salt dissolved into a photoresist;
- patterning the liquid film;
- and
- heating the patterned liquid film, thereby producing the patterned ceramic film.
2 more elements
A ceramic film, comprising:
- a metal-organic liquid precursor solution having a pattern;
- and
- means for converting the precursor solution into the ceramic film having the pattern therein, wherein the ceramic film is adapted for use as at least one of ion-conducting ceramics, electrodes, hard ceramic coatings, transparent conducting oxides, transparent semiconducting oxides, ferroelectric oxides, or dielectric oxides.
A method of making a patterned ceramic film, comprising:
- depositing a liquid precursor solution onto a substrate, thereby forming a liquid film, the liquid precursor solution having at least one soluble metal salt dissolved into a photoresist, wherein the at least one soluble metal salt is substantially completely dissolved into the photoresist, and wherein the liquid precursor solution is substantially fully miscible;
- patterning the liquid film, wherein patterning comprises:
- masking a predetermined portion of the liquid film, wherein the liquid film has a masked portion and an unmasked portion;
- exposing the liquid film to a light source, whereby one of the masked portion and the unmasked portion is cured;
- and
- removing the uncured portion;
- and firing the patterned liquid film at a temperature sufficient to substantially drive off organic materials, thereby rendering the patterned ceramic film;
- wherein the patterned ceramic film is adapted for use as at least one of ion-conducting ceramics, electrodes, hard ceramic coatings, transparent conducting oxides, transparent semiconducting oxides, ferroelectric oxides, or dielectric oxides.
5 more elements
A method of making a patterned ceramic film, comprising:
- depositing a liquid precursor solution onto a substrate, thereby forming a liquid film, the liquid precursor solution having at least one soluble inorganic metal salt dissolved into a photoresist;
- patterning the liquid film;
- and
- heating the patterned liquid film, thereby producing the patterned ceramic film.
1 more element
A liquid precursor solution, comprising:
- a photoresist;
- and
- at least one soluble inorganic metal salt dissolved in the photoresist;
- wherein the liquid precursor solution is adapted to be converted into a ceramic film.
1 more element
Dependencies are inferred from the claim text.