# US 7,071,081 B2 · Method of forming semiconductor device

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- Number: US 7,071,081 B2
- Document ID: US7071081B2
- Status: Granted
- Kind: B2
- Application number: 10/834,836
- Filed: 2004-04-30
- Published: 2004-12-30
- Granted: 2006-07-04
- Earliest claimed: 2003-05-07
- Assignees: Canon Kabushiki Kaisha
- Inventors: Makoto Higashikawa
- Web page: https://patentgrep.com/patent/US7071081B2

## CPC

- H10F 71/107: {Continuous treatment of the devices, e.g. roll-to roll processes or multi-chamber deposition}
- H10F 10/172: comprising multiple PIN junctions, e.g. tandem cells
- H10F 71/103: {including only Group IV materials}
- Y02E 10/547: Monocrystalline silicon PV cells
- Y02E 10/548: Amorphous silicon PV cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

The present invention provides a method of forming a semiconductor device that has a plurality of pin junctions comprising silicon films formed on a substrate by using a radio-frequency plasma CVD method, including: forming a first semiconductor layer; covering a surface of the first semiconductor layer with a member containing water with a content of 0.01 to 0.5 wt % so as to contact each other; removing the member; and forming a second semiconductor layer on the first semiconductor layer. According to the present invention, it is possible to efficiently form a semiconductor device having a multi-layer structure where a number of silicon thin films are laminated, to form a semiconductor device having less variation in characteristics among lots and having more excellent uniformity and characteristics, and to provide a semiconductor device excelling in adhesion and environmental resistance.

## Claims

### Claim 1

A method of forming a semiconductor device that has a plurality of pin junctions, the plurality of pin junctions comprising silicon films formed on a substrate using a radio-frequency plasma CVD method, the method of forming a semiconductor device comprising, in sequence:
a first formation step for forming a first semiconductor layer;
a covering step for covering a surface of the first semiconductor layer with a member having a water content of 0.01 to 0.5 wt % such that the member and the surface of the first semiconductor layer contact each other;
a removing step for removing the member; and
a second formation step for forming a second semiconductor layer on the first semiconductor layer.

### Claim 2 (depends on 1)

The method of forming a semiconductor device according to claim 1, wherein the member is brought into contact with the surface of the first semiconductor layer at a pressure of 10 g/cm2 to 100 g/cm2.

### Claim 3 (depends on 1)

The method of forming a semiconductor device according to claim 1, wherein the surface of the first semiconductor layer has a higher temperature in the covering step than a temperature of the surface of the first semiconductor layer in the removing step, and the temperature of the surface of the first semiconductor layer is gradually decreased between the covering step and the removing step.

### Claim 4 (depends on 1)

The method of forming a semiconductor device according to claim 1, further comprising a keeping step for keeping in the air the substrate on which the first semiconductor layer has been formed and the surface of the first semiconductor layer has been covered with the member, at at least a part between the covering step and the removing step.

### Claim 5 (depends on 1)

The method of forming a semiconductor device according to claim 1, further comprising a keeping step for keeping in a dry nitrogen atmosphere the substrate on which the first semiconductor layer has been formed and the surface of the first semiconductor layer has been covered with the member.

### Claim 6 (depends on 1)

The method of forming a semiconductor device according to claim 1, further comprising a keeping step for keeping in an airtight space the substrate on which the first semiconductor layer has been formed and the surface of the first semiconductor layer has been covered with the member.

### Claim 7 (depends on 1)

The method of forming a semiconductor device according to claim 1, wherein the member is formed of nonwoven cloth.

### Claim 8 (depends on 1)

The method of forming a semiconductor device according to claim 1, wherein the first semiconductor layer is formed of a semiconductor having one conductivity type and the second semiconductor layer is formed of a semiconductor having another conductivity type different from the one conductivity type.

### Claim 9 (depends on 1)

The method of forming a semiconductor device according to claim 1, wherein the first semiconductor layer and the second semiconductor layer are formed of semiconductors having the same conductivity type.

### Claim 10 (depends on 1)

The method of forming a semiconductor device according to claim 1, wherein the radio-frequency plasma CVD method comprises a roll to roll method.