Semiconductor device and its manufacturing method

A method f or manufacturing a semiconductor device, comprising the steps of:

• forming inter-substrate connecting bumps on one of a front surface or both of front and back surfaces of inter-substrate connecting electrodes formed on both front and back surfaces of a substrate, connected by through holes and connected to a wiring pattern, so as to be higher than a required height and making the inter-substrate connecting bumps collapse in a direction of the thickness of the substrate to have the height near the required height;
• connecting electrodes of a semiconductor chip to the wiring pattern formed on the substrate and mounting the electrodes of the semiconductor chip on the front surface or both the front and back surfaces of the substrate;
• applying a polymer material to only a portion of the semiconductor chip and the substrate so as not to cover the collapsed inter-substrate connecting bumps, the entire semiconductor chip, and the entire substrate;
• and
• cutting flat the surfaces of the semiconductor chip and the inter-substrate connecting bumps opposite to the substrate to have a prescribed distance between the cut flat surfaces of the semiconductor chip and the cut flat surfaces of the inter-substrate connecting bumps and the substrate.

A method for manufacturing a layered semiconductor device, comprising the steps of:

• forming inter-substrate connecting bumps on one of a front surface or both of front and back surfaces of inter-substrate connecting electrodes formed on both front and back surfaces of a substrate, connected by through holes and connected to a wiring pattern, so as to be higher than a required height;
• making the inter-substrate connecting bumps collapse in a direction of the thickness of the substrate to have a height near the required height;
• connecting electrodes of a semiconductor chip to the wiring pattern formed on the substrate and mounting the electrodes of the semiconductor chip on the front surface or both the front and back surfaces of the substrate;
• applying a polymer material to only a portion of the semiconductor chip and the substrate so as not to cover the collapsed inter-substrate connecting bumps, the entire semiconductor chip, and the entire substrate;
• cutting flat the surfaces of the semiconductor chip and the inter-substrate connecting bumps opposite to the substrate to have a prescribed distance between the cut flat surfaces of the semiconductor chip and the cut flat surfaces of the inter-substrate connecting bumps and the substrate to obtain each semiconductor device;
• layering a plurality of semiconductor devices thus obtained;
• and
• connecting the inter-substrate connecting bumps of the respective semiconductor devices together or connecting the inter-substrate connecting bumps to the inter-substrate connecting electrodes.

A method for manufacturing a layered semiconductor device having a plurality of semiconductor devices in which each semiconductor device has a substrate with front and back surfaces, a wiring circuit, a number of through holes arranged within the substrate, and a number of pairs of electrodes, each pair of electrodes having a first electrode arranged on the front surface of the substrate and a second electrode arranged on the back surface of the substrate, the first and second electrodes being electrically connected together by a respective through hole and being electrically connected to the wiring circuit, said method comprising the steps of:

• forming a connecting bump with a height higher than a final height on an upper surface of the first electrode of a respective pair of electrodes;
• connecting electrodes of a semiconductor chip to the wiring circuit and mounting the semiconductor chip on the front surface of the substrate;
• applying an encapsulating resin to the front surface of the substrate so as to cover the semiconductor chip and the connecting bump so as to form an encapsulated unit having a top surface and a plurality of side surfaces;
• and
• cutting the top surface of the encapsulated unit until a distance between the front surface of the substrate and each of the cut surface of the encapsulating resin, the cut surface of the semiconductor chip, and the cut surface of the connecting bump has a predetermined value;
• cutting a number of the side surfaces of the encapsulated unit at positions where a number of the through holes and the connecting bump are located such that the number of through holes and the connecting bump are exposed after cutting so as to form a semiconductor device;
• arranging a plurality of semiconductor devices on top of each other;
• and
• connecting the connecting bump of one semiconductor device to the second electrode of an adjacent semiconductor device.

A method for manufacturing a layered semiconductor device having a plurality of semiconductor devices in which each semiconductor device has a substrate with front and back surfaces, a wiring circuit, a number of through holes arranged within the substrate, and a number of pairs of electrodes, each pair of electrodes having a first electrode arranged on the front surface of the substrate and a second electrode arranged on the back surface of the substrate, the first and second electrodes being electrically connected together by a respective through hole and being electrically connected to the wiring circuit, said method comprising the steps of:

• forming a first connecting bump with a height higher than a final height on an upper surface of the first electrode of a respective pair of electrodes, and forming a second connecting bump with a height higher than the final height on an upper surface of the second electrode of the respective pair of electrodes;
• connecting electrodes of a first semiconductor chip to the wiring circuit and mounting the first semiconductor chip on the front surface of the substrate;
• connecting electrodes of a second semiconductor chip to the wiring circuit and mounting the second semiconductor chip on the back surface of the substrate;
• applying an encapsulating resin to the front and back surfaces of the substrate so as to cover the first and second semiconductor chips and the first and second connecting bumps so as to form an encapsulated unit having a top surface, a bottom surface, and a plurality of side surfaces, in which the top surface of the encapsulated unit faces the front surface of the substrate, and the bottom surface of the encapsulated unit faces the back surface of the substrate;
• and
• cutting the top surface of the encapsulated unit until a distance between the front surface of the substrate and each of the cut surface of the encapsulating resin on the front surface of the substrate, the cut surface of the first semiconductor chip, and the cut surface of the first connecting bump has a first predetermined value, and cutting the bottom surface of the encapsulated unit until a distance between the back surface of the substrate and each of the cut surface of the encapsulating resin on the back surface of the substrate, the cut surface of the second semiconductor chip, and the cut surface of the second connecting bump has a second predetermined value so as to form a semiconductor device;
• cutting a number of the side surfaces of the encapsulated unit at positions where a number of the through holes and the first and second connecting bumps are located such that the number of through holes and the first and second connecting bumps are exposed after cutting so as to form a semiconductor device;
• arranging a plurality of semiconductor devices on top of each other;
• and
• connecting the first connecting bump of one semiconductor device to the second connecting bump of an adjacent semiconductor device.

A method for manufacturing a semiconductor device having a substrate with front and back surfaces, a wiring circuit, a number of through holes arranged within the substrate, and a number of pairs of electrodes, each pair of electrodes having a first electrode arranged on the front surface of the substrate and a second electrode arranged on the back surface of the substrate, the first and second electrodes being electrically connected together by a respective through hole and being electrically connected to the wiring circuit, said method comprising the steps of:

• forming a connecting bump with a height higher than a final height on an upper surface of the first electrode of a respective pair of electrodes;
• causing the connecting bump to collapse in a direction substantially perpendicular to the front surface of the substrate so as to reduce its height to that near the final height;
• connecting electrodes of a semiconductor chip to the wiring circuit;
• applying a polymer material to only a portion of the semiconductor chip and the front surface of the substrate so as to mount the semiconductor chip on the front surface of the substrate and so as not to cover the connecting bump, the entire semiconductor chip, and the entire front surface of the substrate;
• and
• cutting top surfaces of the semiconductor chip and the connecting bump having the reduced height until a distance between the front surface of the substrate and each of the cut surface of the semiconductor chip and the cut surface of the connecting bump has a predetermined value.

A method for manufacturing a layered semiconductor device having a plurality of semiconductor devices in which each semiconductor device has a substrate with front and back surfaces, a wiring circuit, a number of through holes arranged within the substrate, and a number of pairs of electrodes, each pair of electrodes having a first electrode arranged on the front surface of the substrate and a second electrode arranged on the back surface of the substrate, the first and second electrodes being electrically connected together by a respective through hole and being electrically connected to the wiring circuit, said method comprising the steps of:

• forming a connecting bump with a height higher than a final height on an upper surface of the first electrode of a respective pair of electrodes;
• causing the connecting bump to collapse in a direction substantially perpendicular to the front surface of the substrate so as to reduce its height to that near the final height;
• connecting electrodes of a semiconductor chip to the wiring circuit;
• applying a polymer material to only a portion of the semiconductor chip and the front surface of the substrate so as to mount the semiconductor chip on the front surface of the substrate and so as not to cover the connecting bump, the entire semiconductor chip, and the entire front surface of the substrate;
• and
• cutting top surfaces of the semiconductor chip and the connecting bump having the reduced height until a distance between the front surface of the substrate and each of the cut surface of the semiconductor chip and the cut surface of the connecting bump has a predetermined value so as to obtain a semiconductor device;
• arranging a plurality of semiconductor devices on top of each other;
• and
• connecting the connecting bump of one semiconductor device to the second electrode of an adjacent semiconductor device.

A method for manufacturing a layered semiconductor device having a plurality of semiconductor devices in which each semiconductor device has a substrate with front and back surfaces, a wiring circuit, a number of through holes arranged within the substrate, and a number of pairs of electrodes, each pair of electrodes having a first electrode arranged on the front surface of the substrate and a second electrode arranged on the back surface of the substrate, the first and second electrodes being electrically connected together by a respective through hole and being electrically connected to the wiring circuit, said method comprising the steps of:

• forming a first connecting bump with a height higher than a final height on an upper surface of the first electrode of a respective pair of electrodes;
• forming a second connecting bump with a height higher than the final height on an upper surface of the second electrode of the respective pair of electrodes;
• causing the first and second connecting bumps to collapse in a direction substantially perpendicular to the front and back surfaces of the substrate so as to reduce the height thereof to that near the final height;
• connecting electrodes of a first semiconductor chip to the wiring circuit;
• applying a polymer material to only a portion of the first semiconductor chip and the front surface of the substrate so as to mount the first semiconductor chip on the front surface of the substrate and so as not to cover the first connecting bump, the entire first semiconductor chip, and the entire front surface of the substrate;
• connecting electrodes of a second semiconductor chip to the wiring circuit;
• applying the polymer to only a portion of the second semiconductor chip and the back surface of the substrate so as to mount the second semiconductor chip on the back surface of the substrate and so as not to cover the second connecting bump, the entire second semiconductor chip, and the entire back surface of the substrate;
• cutting top surfaces of the first semiconductor chip and the first connecting bump having the reduced height until a distance between the front surface of the substrate and each of the cut surface of the first semiconductor chip and the cut surface of the first connecting bump has a first predetermined value, and cutting top surfaces of the second semiconductor chip and the second connecting bump having the reduced height until a distance between the back surface of the substrate and each of the cut surface of the second semiconductor chip and the cut surface of the second connecting bump has a second predetermined value so as to form a semiconductor device;
• arranging a plurality of semiconductor devices on top of each other;
• and
• connecting the first connecting bump of one semiconductor device to the second connecting bump of an adjacent semiconductor device.