# US 7,071,025 B2 · Separating wafers coated with plastic films > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,071,025 B2 - Document ID: US7071025B2 - Status: Granted - Kind: B2 - Application number: 10/038,813 - Filed: 2001-12-31 - Published: 2002-09-05 - Granted: 2006-07-04 - Earliest claimed: 2000-12-29 - Assignees: Texas Instruments Incorporated - Inventors: Michael F. Brenner; Vincent C. Lopes - Web page: https://patentgrep.com/patent/US7071025B2 ## CPC - B81C 1/00896: {Temporary protection during separation into individual elements} - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) ## Abstract The method of protecting micromechanical structures during a wafer fabrication process. A protective layer 402 is deposited to protect the fragile microstructures during a wafer separation process and a post separation cleanup process. Suitable protective layers 402 typically are plastic and tend to deform or delaminate when the wafer is sawn. The deformation of the protective overcoat during the saw process destroys the structures it is intended to protect. To prevent deformation of the protective layer 402, a brittle layer 404 is deposited on the protective layer 402 to hold the protective layer in place during the saw process. Cured photoresist is a suitable protective layer. The photoresist can be applied to the protective layer using standard processes and cured, typically by baking the photoresist. Once the wafer is separated, the brittle layer may be removed. After the debris created during the saw process is removed, the protective overcoat may be removed. The brittle layer 404 and the protective overcoat 402 may be removed at the same time. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. § 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims. ## Claims ### Claim 1 A method of fabricating a micromechanical structure, the method comprising: fabricating at least two micromechanical structures on a substrate; overcoating said micromechanical structures with a protective layer; overcoating said protective layer with a brittle layer; and sawing said brittle layer and said protective layer. ### Claim 2 (depends on 1) The method of claim 1, said fabricating comprising fabricating at least two micromechanical devices on a semiconductor substrate. ### Claim 3 (depends on 1) The method of claim 1, said fabricating comprising fabricating at least two micromirror devices on said substrate. ### Claim 4 (depends on 1) The method of claim 1, said fabricating comprising fabricating at least two micromirror devices on a semiconductor substrate. ### Claim 5 (depends on 1) The method of claim 1, said fabricating comprising fabricating at least two micromirror arrays on said substrate. ### Claim 6 (depends on 1) The method of claim 1, said fabricating comprising fabricating at least two micromirror arrays on a semiconductor substrate. ### Claim 7 (depends on 1) The method of claim 1, said overcoating with a protective layer comprising overcoating with a plastic layer. ### Claim 8 (depends on 1) The method of claim 1, said overcoating with a protective layer comprising overcoating with a polymer resin. ### Claim 9 (depends on 1) The method of claim 1, said overcoating with a protective layer comprising overcoating with a PARYLENE layer. ### Claim 10 (depends on 1) The method of claim 1, said overcoating with a protective layer comprising overcoating with a acrylate monomer layer. ### Claim 11 (depends on 1) The method of claim 1, said overcoating with a protective layer comprising overcoating with a acrylate oligomer layer. ### Claim 12 (depends on 1) The method of claim 1, said overcoating with a protective layer comprising applying a protective overcoat by vapor deposition. ### Claim 13 (depends on 1) The method of claim 1, said overcoating with a protective layer comprising applying a protective overcoat by immersing said substrate in a liquid protective overcoat material. ### Claim 14 (depends on 1) The method of claim 1, said overcoating with a protective layer comprising applying a protective overcoat by spinning-on a protective overcoat layer. ### Claim 15 (depends on 1) The method of claim 1, comprising; thermally curing said protective layer. ### Claim 16 (depends on 1) The method of claim 1, comprising: curing said protective layer using ultraviolet light. ### Claim 17 (depends on 1) The method of claim 1, said overcoating with a brittle layer comprising overcoating with a photoresist layer. ### Claim 18 (depends on 1) The method of claim 1, said overcoating with a brittle layer comprising overcoating with a photoresist layer, further comprising: baking said photoresist layer. ### Claim 19 (depends on 1) The method of claim 1, said overcoating with a brittle layer comprising overcoating with a photoresist layer, further comprising: deep UV hardening said photoresist layer. ### Claim 20 (depends on 1) The method of claim 1, said overcoating with a brittle layer comprising overcoating with a brittle layer to prevent said protective layer from delaminating from said substrate. ### Claim 21 (depends on 1) The method of claim 1, said sawing comprising sawing through said protective and overcoat layers. ### Claim 22 (depends on 1) The method of claim 1, said sawing comprising sawing through said protective and overcoat layers and said substrate to separate said micromechanical devices. ### Claim 23 (depends on 1) The method of claim 1, said sawing comprising sawing through said protective and overcoat layers and partially through said substrate layer.