Methods of making a three terminal magnetic sensor having a collector region electrically isolated from a carrier substrate body
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorJeffrey S. Lille
Life of this patent
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Abstract
In one illustrative example, a three terminal magnetic sensor includes a collector region made of a semiconductor material, a base region, and an emitter region. An insulator layer is formed between the collector region and a carrier substrate body which carries the three terminal magnetic sensor. The insulator layer serves to reduce a capacitance otherwise present between the collector region and magnetic media at a magnetic field sensing plane of the three terminal magnetic sensor. Thus, the insulator layer electrically isolates the collector region from the carrier substrate body. The structure may be formed through use of a separation by implanting oxygen (SIMOX) technique or a wafer-bonding technique, as examples.
Claims9
A method of forming a three terminal magnetic sensor device for use in a data storage device which includes a slider body, the method comprising:
- providing the slider body which comprises a semiconductor material;
- forming an insulator layer in between the slider body and a collector region of the three terminal magnetic sensor device;
- forming, over the collector region, a base region of the three terminal magnetic sensor device;
- forming, over the base region, an emitter region of the three terminal magnetic sensor device;
- and
- wherein the insulator layer is formed so as to electrically isolate the collector region from the slider body, so that a reduced capacitance is provided between the collector region and magnetic media at a magnetic field sensing plane of the three terminal magnetic sensor.
A method of forming a three terminal magnetic sensor device for use in a data storage device which includes a slider body, comprising:
- providing the slider body which comprises a semiconductor material;
- forming an insulator layer in between the slider body and a collector region of the three terminal magnetic sensor device by performing a separation by implanting oxygen technique which includes the acts of:
- performing an oxygen or nitrogen ion implantation over a surface of the slider body;
- annealing the slider body;
- forming, over the collector region, a base region of the three terminal magnetic sensor device;
- forming, over the base region, an emitter region of the three terminal magnetic sensor device;
- and
- wherein the insulator layer is formed so as to electrically isolate the collector region from the slider body, so that a reduced capacitance is provided between the collector region and magnetic media at a magnetic field sensing plane of the three terminal magnetic sensor.
A method of forming a three terminal magnetic sensor device for use in a data storage device which includes a slider body, comprising:
- providing the slider body which comprises a semiconductor material;
- forming an insulator layer in between the slider body and a collector region of the three terminal magnetic sensor device by performing a wafer bonding process which includes the act of:
- bonding a first wafer over a second wafer which has at least part of the insulator layer to be formed;
- forming, over the collector region, a base region of the three terminal magnetic sensor device;
- forming, over the base region, an emitter region of the three terminal magnetic sensor device;
- and
- wherein the insulator layer is formed so as to electrically isolate the collector region from the slider body, so that a reduced capacitance is provided between the collector region and magnetic media at a magnetic field sensing plane of the three terminal magnetic sensor.
Dependencies are inferred from the claim text.