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US 7,070,904 B2Granted
Polybenzoxazoles from poly-o-hydroxyamide, novel poly-o-hydroxyamides, preparation processes therefor, and their application in microelectronics
AssigneeInfineon Technologies AG
InventorRecai Sezi
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Abstract
High-temperature-stable polybenzoxazoles are formed from novel poly-o-hydroxyamides. The novel poly-o-hydroxyamides have low dielectric constants, are suitable for exposure at 248 nm or shorter wavelengths, and have hydroxyl groups at least some of which have been protected by tert-butoxycarbonyl protective groups.
Claims18
A poly-o-hydroxyamide, comprising:
- hydroxyl groups;
- and
- tert-butoxycarbonyl groups protecting at least some of said hydroxyl groups, said tert-butoxycarbonyl groups having the formula
- wherein the radicals R3, R4, and R5 are selected from the group consisting of —H, —F, —(CH2)n—CH3, —(CF2)n—CF3, where n=0 to 10, and with a proviso that at least one of the radicals R3, R4, and R5 is different from hydrogen.
1 more element
A method of preparing a poly-o-hydroxyamide, which comprises the following steps:
- providing bisaminophenol having at least one protected hydroxyl group, the hydroxyl function being protected by a tert-butoxycarbonyl group defined by the formula
- wherein the radicals R3, R4, and R5 are selected from the group consisting of —H, —F, —(CH2)n—CH3, —(CF2)n—CF3, where n=0 to 10, and with a proviso that at least one of the radicals R3, R4, and R5 is different from hydrogen;
- and
- reacting the bisaminophenol having the protected hydroxyl group with at least one activated dicarboxylic acid.
1 more element
A process for preparing a poly-o-hydroxyamide, which comprises reacting a poly-o-hydroxyamide of the formula
- having unprotected hydroxyl groups, where R1=R2=—H, with di-tert-butyl dicarbonate.
Dependencies are inferred from the claim text.