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US 7,070,855 B2Granted
Porous material and production process thereof
AssigneeCanon Kabushiki Kaisha
InventorsKazuhiko Fukutani, Tohru Den
Life of this patent
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Abstract
There are provided a porous material and a process for producing the same. The porous material has a plurality of columnar pores and an area surrounding the pores, and the area is an amorphous area containing C, Si, Ge or a combination thereof.
Claims7
A porous article comprising:
- a substrate;
- and
- a porous material formed on the substrate, the porous material comprising a plurality of columnar pores and an area surrounding the pores, the area being an amorphous Si or an amorphous SixGe1−x (x≠0),
- wherein the depth direction of the columnar pores is substantially perpendicular to the substrate,
- wherein the columnar pores have a circular or elliptic cross-section in a direction parallel to the substrate, and
- wherein an average interval between centers of adjacent pores is 30 nm or less.
3 more elements
Dependencies are inferred from the claim text.