Process for growing a carbon film
AssigneeSI Diamond Technology, Inc.
InventorsZhidan Li Tolt, Zvi Yaniv, Richard Lee Fink
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Abstract
A film (carbon and/or diamond) for a field emitter device, which may be utilized within a computer display, is produced by a process utilizing etching of a substrate and then depositing the film. The etching step creates nucleation sites on the substrate for the film deposition process. With this process patterning of the emitting film is avoided. A field emitter device can be manufactured with such a film.
Claims26
A method for making a field emitter device comprising the steps of:
- providing a substrate;
- treating said substrate to modify a morphology of said substrate;
- and
- growing a carbon film on said treated substrate.
A field emitter device manufactured by the following steps:
- providing a substrate;
- treating said substrate to modify a morphology of said substrate;
- and
- growing a carbon film on said treated substrate, wherein only a portion of said substrate is subjected to said treating step, and wherein said carbon film grown on said treated substrate is a better field emitter than carbon film grown on an untreated portion of said substrate, wherein said carbon film grown on said treated portion of said substrate emits substantially more electrons when subjected to a specified electric field than said carbon film on said untreated substrate.
A method for depositing a carbon film comprising the steps of:
- depositing a metal layer on a substrate whereby said metal layer has a predefined pattern so that a portion of said substrate is accessible through said metal layer;
- and
- depositing said carbon film on said portion of said substrate.
A method for making a field emitter device comprising the steps of:
- providing a substrate;
- treating said substrate to modify (1) a morphology of said substrate, and/or (2) a chemical composition of said substrate;
- and
- growing a carbon film on said treated substrate, wherein only a portion of said substrate is subjected to said treating step, and wherein said carbon film grown on said treated substrate is a better field emitter than carbon film grown on an untreated portion of said substrate, wherein said carbon film grown on said treated portion of said substrate emits substantially more electrons when subjected to a specified electric field than said carbon film on said untreated substrate.
Dependencies are inferred from the claim text.