Monolithic printhead with built-in equipotential network and associated manufacturing method
AssigneeOlivetti Tecnost S.p.A.
InventorsRenato Conta, Mara Piano
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Abstract
An actuating assembly (50) for ink jet printheads consists of a silicon die (61), which comprises a groove (45) and a lamina (64), and of a structure (75) produced monolithically in the same production process. The actuating assembly (50) comprises a microhydraulics (63), the latter in turn comprising a plurality of channels (67) and chambers (57), made inside the structure (75) by means of a sacrificial metallic layer (54). A conducting layer (26) forms a single interconnected equipotential network used as the electrode during the processes of electrochemical etch stopping on the groove (45), of electrodeposition of the sacrificial layer (54) and of the latter's subsequent removal.
Claims18
Thermal ink jet printhead for the emission of droplets of ink on a printing medium through a plurality of nozzles, comprising a monolithic actuating assembly provided with a die comprising a groove and a lamina made of an array of layers, wherein at least one conducting layer belonging to the array of said layers belonging to said lamina is made of electrically conducting material and forms a single network connected through the die, and wherein said lamina also comprises a layer of N-well Silicon, and said layer of N-well Silicon is electrically connected to said conducting layer by means of at least one feedthrough contact.
Wafer of semiconductor material comprising a plurality of dice, each of said dice being suitable to form part of a monolithic actuating assembly for an ink jet printhead, each of said dice also being provided with a lamina made of numerous layers, wherein at least one conducting layer belonging to the array of said layers belonging to said lamina is made of electrically conducting material and forms a single network connected on the inside of each of said dice and between at least two different said dice.
A Thermal ink jet printhead for the emission of droplets of ink on a printing medium through a plurality of nozzles, comprising a monolithic actuating assembly provided with a substrate comprising a groove and a lamina made of an array of layers, wherein at least one conducting layer belonging to the array of said layers is made of electrically conducting material and forms a single network connected through the substrate, and said lamina comprises a layer of N-well Silicon that is electrically connected to said conducting layer by at least one feedthrough contact, wherein said groove is disposed adjacent the layer of N-well Silicon and receives said ink therein.
Dependencies are inferred from the claim text.