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US 7,069,944 B2Granted
Flow rate control device
AssigneeSMC Corporation
InventorsFumio Morikawa, Hiroshi Kondou
Life of this patent
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Abstract
To control a flow rate ranging from an extremely-low rate to a high rate, particularly, to control an extremely-low flow rate accurately, the following processes are executed. A regulator, a flow rate adjustment valve connected in series downstream of the regulator and adjusting a valve opening of its valve provided to a passage, and a flow rate sensor are provided. A regulator controlled degree and a valve opening controlled degree of the flow rate adjustment are found in accordance with a detection value and a target flow rate value to control the flow rate.
Claims4
A flow rate control device comprising:
- a regulator for reducing a pressure of a supplied liquid;
- a flow rate adjustment valve for adjusting an opening degree of its valve provided to a passage, the flow rate adjustment valve being connected in series downstream of the regulator;
- a flow rate sensor for detecting a flow rate of the liquid;
- and
- a control portion for controlling the regulator by finding a regulator controlled degree in accordance with a detection value of the flow rate sensor and a target flow rate value, and for controlling the flow rate adjustment valve by finding a valve opening controlled degree of the flow rate adjustment valve.
2 more elements
Dependencies are inferred from the claim text.