US 7,069,779 B2Granted

Thermal flow sensor having an inverted substrate

AssigneeCodman & Shurtleff, Inc.

InventorsFrank Zumkehr, Juergen Burger, Toralf Bork, Alec Ginggen

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Abstract

A thermal flow sensor has a first substrate, second substrate and a third substrate, each of which has a first side and a second opposite side. The first substrate is connected to the second substrate such that the second side of the first substrate abuts the first side of the second substrate. The third substrate is connected to the second substrate such that the second side of the second substrate abuts the first side of the third substrate. The second substrate has a groove formed therein so as to form a conduit bounded by the second substrate and the second side of the first substrate and the first side of the third substrate. A heater is disposed on the first side of the first substrate opposed to the conduit. A first temperature sensor is disposed on the first side of the first substrate opposed to the conduit.

Claims8

Dependent claims

A thermal flow sensor comprising:

a first substrate having a first side and a second opposite side;
a second substrate having a first side and a second opposite side, said first substrate being connected to said second substrate such that said second side of said first substrate abuts said first side of said second substrate;
a third substrate having a first side and a second opposite side, said third substrate being connected to said second substrate such that said second side of said second substrate abuts said first side of said third substrate;
wherein said second substrate having a cutout formed therein so as to form a conduit bounded by said second substrate and said second side of said first substrate and said first side of said third substrate,
a heater disposed on said first side of said first substrate opposed to said conduit;
and
a first temperature sensor disposed on said first side of said first substrate opposed to said conduit.

4 more elements

Dependencies are inferred from the claim text.