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US 7,069,647 B2Granted
Method for populating a substrate with electronic components
AssigneeInfineon Technologies AG
InventorsJürgen Högerl, Jens Pohl, Uta Sasse, Ingo Wennemuth
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Abstract
A novel method and placement system are configured for populating a substrate with an electronic component. The placement system has a substrate holding device for receiving the substrate, a wafer holding device above the substrate holding device serving for receiving a wafer holding frame, and a vacuum forceps holding device arranged above the wafer holding device. The wafer holding frame can receive a complete semiconductor wafer divided into electronic components.
Claims9
A method for populating a substrate with electronic components, the method which comprises:
- providing a wafer holding frame with a perforated film clamped in the wafer holding frame and formed with passage openings arranged in individual rows and columns, and a plurality of electronic components of a semiconductor wafer separated into electronic components disposed under the passage openings of the film;
- providing a substrate with predetermined positions for placement of the electronic components;
- supplying the wafer holding frame into a positioning wafer holding device and supplying the substrate into a positioning substrate holding device and horizontally orienting the positioning wafer holding device and the positioning substrate holding device in an X direction and a Y direction relative to one another in a predetermined position for positioning a respective electronic component of the electronic components of the semiconductor wafer on the substrate;
- moving a vacuum forceps with a vacuum forceps holding device, while monitoring with a component position identification device, from a rest position vertically in a Z direction through a respective passage opening of the film while carrying along the electronic component, from a preliminary position, and carrying the electronic component into a mounting position on the substrate with rotation about the Z axis and fine adjustment of the vacuum forceps in the X direction and the Y direction.
1 more element
Dependencies are inferred from the claim text.