Method for manufacturing a liquid ejecting head

A method for manufacturing a liquid ejecting head that includes a main assembly substrate portion having a pressure chamber in fluid communication with a liquid ejection outlet and includes a piezoelectric structure provided corresponding to the pressure chamber, wherein the piezoelectric structure includes a vibrational plate and a piezoelectric element that includes (i) a piezoelectric film and (ii) a lower electrode and an upper electrode sandwiching the piezoelectric film, said method comprising:

• a step of providing a silicon substrate having a monocrystal silicon layer on a silicon layer, with a first oxide layer between the monocrystal silicon layer and the silicon layer;
• a step of forming a second oxide layer on the silicon substrate to form the vibrational plate, the vibrational plate comprising the monocrystal silicon layer, the first oxide layer and the second oxide layer, the first oxide layer and the second oxide layer sandwiching the monocrystal silicon layer;
• a step of forming the lower electrode on the second oxide layer;
• a step of forming a piezoelectric film of a single orientation crystal or a monocrystal on the lower electrode;
• a step of separating the piezoelectric film into a plurality of portions;
• a step of forming the upper electrode on the piezoelectric film;
• and
• a step of forming the pressure chamber by partly removing the silicon layer, which supports the vibrational plate.