Anti-vibration technique
AssigneeCanon Kabushiki Kaisha
InventorMasahiro Morisada
Life of this patent
Estimating the term…
Abstract
A supporting apparatus includes a supporting member configured to support a movable member, an acceleration sensor configured to detect acceleration of the supporting member, an actuator configured to drive the supporting member, a memory configured to memorize offset data for the acceleration sensor, an offset unit configured to offset an output of the acceleration sensor in accordance with the offset data in the memory, a discrimination unit configured to discriminate whether the offset data should be renewed or not on the basis of an output of the acceleration sensor, and a renewing unit configured to renew the offset data on the basis of the result of the discrimination made by the discrimination unit.
Claims10
An exposure apparatus comprising:
- a projection lens for projecting a pattern onto a substrate;
- a stage being movable while carrying the substrate thereon;
- and
- a supporting apparatus for supporting said stage, said supporting apparatus comprising:
- (i) a supporting member configured to support a movable member;
- (ii) an acceleration sensor configured to detect acceleration of said supporting member;
- (iii) an actuator configured to drive said supporting member;
- (iv) a memory configured to memorize offset data for said acceleration sensor;
- (v) an offset unit configured to offset an output of said acceleration sensor in accordance with the offset data in said memory;
- (vi) a discrimination unit configured to discriminate whether the offset data should be renewed or not on the basis of an output of said acceleration sensor;
- and
- (vii) a renewing unit configured to renew the offset data on the basis of the result of the discrimination made by said discrimination unit.
An exposure apparatus comprising:
- a projection lens for projecting a pattern onto a substrate;
- a stage being movable while carrying the substrate thereon;
- and
- a supporting apparatus for supporting said stage, said supporting apparatus comprising:
- (i) a supporting member configured to support a movable member;
- (ii) an acceleration sensor configured to detect acceleration of said supporting member;
- (iii) an actuator configured to drive said supporting member;
- (iv) a memory configured to memorize offset data for said acceleration sensor;
- (v) offset means for offsetting an output of said acceleration sensor in accordance with the offset data in said memory;
- (vi) discrimination means for discriminating whether the offset data should be renewed or not on the basis of an output of said acceleration sensor;
- and
- (vii) renewing means for renewing the offset data on the basis of the result of the discriminating performed by said discrimination means.
An exposure apparatus comprising:
- a projection lens for projecting a pattern onto a substrate;
- a stage being movable while carrying the substrate thereon;
- a supporting system for supporting said stage;
- and
- a controller for controlling said supporting system in accordance with a control method of controlling a supporting system, wherein acceleration of a supporting member is detected by use of an acceleration sensor and wherein the supporting member is driven by use of an actuator, said method comprising the steps of:
- (i) storing offset data related to the acceleration sensor;
- (ii) discriminating whether the acceleration offset data should be renewed or not, on the basis of an output of the acceleration sensor;
- (iii) renewing the offset data on the basis of the result of the discrimination;
- and
- (iv) controlling the drive of the supporting member while reflecting the renewed offset data.
An exposure apparatus comprising:
- a projection lens for projecting a pattern onto a substrate;
- a stage being movable while carrying the substrate thereon;
- a supporting system for supporting said stage;
- and
- a controller for controlling said supporting system in accordance with a control method of controlling a supporting system, wherein acceleration of a supporting member is detected by use of an acceleration sensor and wherein the supporting member is driven by use of an actuator, said method comprising the steps of:
- (i) storing offset data related to the acceleration sensor;
- (ii) discriminating whether the acceleration offset data should be renewed or not, on the basis of an output of the acceleration sensor;
- (iii) repeating said discriminating step more than once;
- and
- (iv) providing an alarm when the results of discriminations made in said discriminating step are all negative.
Dependencies are inferred from the claim text.