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US 7,069,098 B2Granted
Method and system for prioritizing material to clear exception conditions
AssigneeAdvanced Micro Devices, Inc.
InventorMatthew A. Purdy
Life of this patent
Estimating the term…
Abstract
The present invention is generally directed to various methods and systems for prioritizing material to clear exception conditions. In one illustrative embodiment, the method includes providing a plurality of workpieces, each of the workpieces having an associated quantity of material that cannot be processed until the workpiece has been processed, and determining a priority for processing each of the plurality of workpieces based upon at least the associated quantity of material that cannot be processed.
Claims30
A method, comprising:
- providing a plurality of workpieces, each of said workpieces having an associated quantity of material that cannot be processed until said workpiece has been processed;
- and
- determining a priority for processing each of said plurality of workpieces based upon at least said associated quantity of material that cannot be processed.
A method, comprising:
- providing a plurality of workpieces;
- for each of said workpieces, identifying a quantity of material that cannot be processed until said workpiece has been subjected to at least one metrology operation;
- and
- determining a priority for processing each of said plurality of workpieces based upon at least said quantity of material that cannot be processed.
1 more element
A method, comprising:
- providing a plurality of wafer lots;
- for each of said wafer lots, identifying a quantity of material that cannot be processed until said wafer lot has been subjected to at least one metrology operation;
- and
- determining a priority for processing each of said plurality of wafer lots based upon said identified quantity of material that cannot be processed.
1 more element
Dependencies are inferred from the claim text.