CPP GMR read head
AssigneeHeadway Technologies, Inc.
InventorsMin Li, Kunliang Zhang, Rachid Sbiaa, Cheng T. Horng, Simon Liao, Kochan Ju
Life of this patent
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Abstract
Replacing ruthenium with rhodium as the AFM coupling layer in a synthetically pinned CPP GMR structure enables the AP1/AP2 thicknesses to be increased. This results in improved stability and allows the free layer and AFM layer thicknesses to be decreased, leading to an overall improvement in the device performance. Another key advantage of this structure is that the magnetic annealing requirements (to establish antiparallelism between AP1 and AP2) can be significantly relaxed.
Claims20
A process to manufacture a CPP GMR read head, comprising:
- depositing, in succession on a lower lead layer, a seed layer and a pinning layer;
- on said pinning layer, depositing a first layer of CoFe to a thickness between 50 and 90 Angstroms;
- depositing a layer of rhodium, to a thickness between about 5 and 7 Angstroms, on said first layer of CoFe;
- on said rhodium layer, depositing a second layer of CoFe to a thickness between 50 and 90 Angstroms;
- on said second layer of CoFe, depositing a copper spacer layer;
- on said copper spacer layer, depositing a free layer to a thickness between 20 and 60 Angstroms;
- through annealing in a magnetic field between 10 and 15 kOe, for between 300 and 600 minutes at a temperature between 200 and 250° C., causing said first CoFe layer and said pinning layer to become magnetically coupled to one another;
- and
- on said free layer, depositing an upper lead layer, thereby forming GMR read head.
A process to manufacture a CPP GMR read head, comprising:
- depositing a free layer, to a thickness between 20 and 50 Angstroms, on a lower lead layer;
- depositing a copper spacer layer on said free layer;
- on said copper spacer layer, depositing a first layer of CoFe to a thickness between 50 and 90 Angstroms;
- depositing a layer of rhodium, to a thickness between about 5 and 7 Angstroms, on said first layer of CoFe;
- on said rhodium layer, depositing a second layer of CoFe to a thickness between 50 and 90 Angstroms;
- depositing a pinning layer on said second layer of CoFe;
- through annealing in a magnetic field between 10 and 15 kOe, for between 300 and 600 minutes at a temperature between 250 and 300° C., causing said second layer of CoFe to become magnetically coupled to said pinning layer;
- and
- on said pinning layer, depositing an upper lead layer, thereby forming said CPP GMR read head.
A process to manufacture a magnetic tunneling read head, comprising:
- depositing, in succession on a lower lead layer, a seed layer and a pinning layer;
- on said pinning layer, depositing a first layer of CoFe to a thickness between 50 and 90 Angstroms;
- depositing a layer of rhodium, to a thickness between about 5 and 7 Angstroms, on said first layer of CoFe;
- on said rhodium layer, depositing a second layer of CoFe to a thickness between 50 and 90 Angstroms;
- on said second layer of CoFe, depositing an insulated tunneling layer;
- on said insulated tunneling layer, depositing a free layer to a thickness between 20 and 50 Angstroms;
- through annealing in a magnetic field between 10 and 15 kOe, for between 300 and 600 minutes at a temperature between 250 and 280° C., causing said first CoFe layer to be magnetically coupled to said pinning layer;
- and
- on said free layer, depositing an upper lead layer, thereby forming said magnetic tunneling read head.
A process to manufacture a magnetic tunneling read head, comprising:
- depositing a free layer, to a thickness between 20 and 50 Angstroms, on a lower lead layer;
- depositing an insulated tunneling layer on said free layer;
- on said insulated tunneling layer, depositing a first layer of CoFe to a thickness between 50 and 90 Angstroms;
- depositing a layer of rhodium, to a thickness between about 5 and 7 Angstroms, on said first layer of CoFe;
- on said rhodium layer, depositing a second layer of CoFe to a thickness between 50 and 90 Angstroms;
- depositing a pinning layer on said second layer of CoFe;
- through annealing in a magnetic field between 10 and 15 kOe, for between 300 and 600 minutes at a temperature between 250 and 280° C., causing said second CoFe layer to be magnetically coupled to said pinning layer;
- and
- on said pinning layer, depositing an upper lead layer, thereby forming said magnetic tunneling read head.
Dependencies are inferred from the claim text.