US 7,068,474 B2Granted

Thin film piezoelectric element; actuator, head support mechanism, and disc recording and reproducing device using the thin film piezoelectric element; and method of manufacturing the thin film piezoelectric element

AssigneeMatsushita Electric Industrial Co., Ltd.

InventorsHideki Kuwajima, Hirokazu Uchiyama, Yuko Ogawa

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Abstract

A first counter electrode and a second counter electrode, for electrically coupling a first piezoelectric element unit and a second piezoelectric element unit, for composing a thin film piezoelectric element are common floating electrodes. A first principal electrode film and a second principal electrode film of each piezoelectric element unit are connected, and a voltage is applied between the two piezoelectric element units. As a result, by the wiring of two terminals only without using grounding electrode wiring, the first piezoelectric element unit and second piezoelectric element unit can be driven, so that the wiring process may be substantially simplified.

Claims15

Dependent claims

A thin film piezoelectric element comprising:

a pair of piezoelectric element units including a first piezoelectric element unit and a second piezoelectric element unit;
wherein said first piezoelectric element unit includes a first structure, and said second piezoelectric element unit includes a second structure;
wherein each of said first and second structures comprises a first piezoelectric thin film enclosed between a first principal electrode film and a first counter electrode film, and a second piezoelectric thin film enclosed between a second principal electrode film and a second counter electrode film, said first counter electrode film and said second counter electrode film being bonded together so as to face each other via an adhesive layer;
wherein said first structure and said second structure are disposed on substantially a same plane;
wherein said first and second structures are generally separate from each other but are coupled together at a bonding-region, said first and second counter electrode films of said first structure being coupled to said first and second counter electrode films of said second structure, respectively, at said bonding-region;
wherein said first piezoelectric element unit includes a wiring connection part connecting said first principal electrode film of said first structure with said second principal electrode film of said first structure, and said second piezoelectric element unit includes a wiring connection part connecting said first principal electrode film of said second structure with said second principal electrode film of said second structure;
wherein, at said bonding-region, said first counter electrode film of said first structure is integrally formed with said first counter electrode film of said second structure;
and
wherein, at said bonding region, said second counter electrode film of said first structure is integrally formed with said second counter electrode film of said second structure.

6 more elements

A thin film piezoelectric element comprising:

a pair of piezoelectric element units including a first piezoelectric element unit and a second piezoelectric element unit;
wherein said first piezoelectric element unit includes a first structure, and said second piezoelectric element unit includes a second structure;
wherein each of said first and second structures comprises a first piezoelectric thin film enclosed between a first principal electrode film and a first counter electrode film, and a second piezoelectric thin film enclosed between a second principal electrode film and a second counter electrode film, said first counter electrode film and said second counter electrode film being bonded together so as to face each other via an adhesive layer;
wherein said first structure and said second structure are disposed on substantially a same plane;
wherein said first and second structures are generally separate from each other but are coupled together at a bonding-region, said first and second counter electrode films of said first structure being coupled to said first and second counter electrode films of said second structure, respectively, at said bonding-region;
wherein said first piezoelectric element unit includes a wiring connection part connecting said first principal electrode film of said first structure with said second principal electrode film of said first structure, and said second piezoelectric element unit includes a wiring connection part connecting said first principal electrode film of said second structure with said second principal electrode film of said second structure;
wherein said first piezoelectric thin film of said first structure is integrally formed with said first piezoelectric thin film of said second structure at said bonding-region;
and
wherein said second piezoelectric thin film of said first structure is integrally formed with said second piezoelectric thin film of said second structure at said bonding-region.

6 more elements

A thin film piezoelectric element comprising:

a pair of piezoelectric element units including a first piezoelectric element unit and a second piezoelectric element unit;
wherein said first piezoelectric element unit includes a first structure, and said second piezoelectric element unit includes a second structure;
wherein each of said first and second structures comprises a first piezoelectric thin film enclosed between a first principal electrode film and a first counter electrode film, and a second piezoelectric thin film enclosed between a second principal electrode film and a second counter electrode film, said first counter electrode film and said second counter electrode film being bonded together so as to face each other via an adhesive layer;
wherein said first structure and said second structure are disposed on substantially a same plane;
wherein said first and second structures are generally separate from each other but are coupled together at a bonding-region, said first and second counter electrode films of said first structure being coupled to said first and second counter electrode films of said second structure, respectively, at said bonding-region;
wherein said first piezoelectric element unit includes a wiring connection part connecting said first principal electrode film of said first structure with said second principal electrode film of said first structure, and said second piezoelectric element unit includes a wiring connection part connecting said first principal electrode film of said second structure with said second principal electrode film of said second structure;
wherein said wiring connection parts of said first and second piezoelectric element units, respectively, are formed adjacent leading ends or rear edges of said first and second structures, respectively;
wherein said first principal electrode films of said first and second structures have projection portions exposed from said first and second structures, respectively, adjacent the leading ends or rear edges of said first and second structures, respectively;
and
wherein said wiring connection parts are electrically connected to said protrusion portions of said first and second principal electrode films by conductor films formed on outer circumferences of said first and second structures, respectively.

7 more elements

An actuator comprising:

a holding substrate having a terminal electrode;
and
a thin film piezoelectric element mounted to said holding substrate, said thin film piezoelectric element comprising first and second piezoelectric element units disposed mirror symmetrically with respect to a center line on said holding substrate and spaced apart at a specific interval;
wherein said first and second piezoelectric element units are arranged to be operable to expand and contract in mutually opposite directions via piezoelectric motion and cause an element mounted on said holding substrate to be moved in a direction generally perpendicular to said mutually opposite directions;
wherein said first piezoelectric element unit includes a first structure, and said second piezoelectric element unit includes a second structure;
wherein each of said first and second structures comprises a first piezoelectric thin film enclosed between a first principal electrode film and a first counter electrode film, and a second piezoelectric thin film enclosed between a second principal electrode film and a second counter electrode film, said first counter electrode film and said second counter electrode film being bonded together so as to face each other via an adhesive layer;
wherein said first structure and said second structure are disposed on substantially a same plane;
wherein said first and second structures are generally separate from each other but are coupled together at a bonding-region, said first and second counter electrode films of said first structure being coupled to said first and second counter electrode films of said second structure, respectively, at said bonding-region;
wherein said first piezoelectric element unit includes a wiring connection part connecting said first principal electrode film of said first structure with said second principal electrode film of said first structure, and said second piezoelectric element unit includes a wiring connection part connecting said first principal electrode film of said second structure with said second principal electrode film of said second structure;
wherein said wiring connection parts of said first and second piezoelectric element units and said terminal electrode of said holding substrate are connected so as to conduct with each other.

7 more elements

A method of manufacturing a thin film piezoelectric element, comprising:

forming, on a first substrate, a first principal electrode film having a slit of a specified width;
forming a first piezoelectric thin film on the first principal electrode film and in the slit;
forming a first counter electrode film on the first piezoelectric thin film so as to leave a specified region of the first piezoelectric thin film uncovered by the first counter electrode film, said specified region having a specified width and extending in a direction orthogonal to the slit;
forming, on a second substrate, a second principal electrode film having a slit of a same width as the slit of the first principal electrode film;
laminating a second piezoelectric thin film in a same shape as the first piezoelectric thin film and a second counter electrode film in a same shape as the first counter electrode film;
fixing the first counter electrode film and the second counter electrode film via an adhesive layer, so that the slit of the first principal electrode film and the slit of the second principal electrode film substantially coincide with each other;
removing only the second substrate;
processing the first principal electrode film, the first piezoelectric thin film, the first counter electrode film, the second counter electrode film, the second piezoelectric thin film, the second principal electrode film and the adhesive layer on the first substrate for forming first and second structures that are mirror symmetrical with respect to a center line of said slits to allow for piezo electric motion, so that a bonding-region of partially mutually integral structure of said first and second structures is positioned on an extension line of said slit, and forming protrusions exposed from said first and second the structures in part of each first principal electrode film of said first and second structures;
and
forming wiring connection parts for connecting the protrusions of the first principal electrode with the second principal electrode of each of said first and second structures.

7 more elements

A method of manufacturing a thin film piezoelectric element, comprising:

forming a pair of first principal electrode films of specified shapes that are mirror symmetrical with respect to a first slit extending in a first direction;
forming a substantially U-shaped first piezoelectric thin film on the pair of first principal electrode films and in part of said first slit, said first piezoelectric thin film having a smaller length in said first direction than the first principal electrode films so as to leave specified regions of the first principal electrode films uncovered by the first piezoelectric thin film, said specified regions being located at one end and extending in a second direction orthogonal to said first direction;
forming a first counter electrode film having a smaller length in said first direction than the first piezoelectric thin film so as to leave a region of said first piezoelectric thin film uncovered by said first counter electrode film only at the one end;
forming a pair of second principal electrode films that are mirror symmetrical with respect to a second slit extending in a third direction, said second principal electrode films having a smaller length in said third direction than the first principal electrode films have in said first direction, said second slit having a same width as said first slit;
forming a substantially U-shaped second piezoelectric thin film on the pair of second principal electrode films and in part of the second slit;
forming a second counter electrode film having a smaller length in said third direction than the second piezoelectric thin film only so as to leave a region of said second piezoelectric thin film uncovered by said second counter electrode film at the one end;
fixing the first counter electrode film to the second counter electrode film via an adhesive layer, so that the first slit of the first principal electrode film and the second slit of the second principal electrode film substantially coincide with each other;
removing the second substrate;
processing the adhesive layer on the first substrate by photolithography and etching for forming first and second structures that are mirror symmetrical with respect a center line of the first and second slits to allow for piezoelectric motion, so that a bonding-region of partially mutually integral structure of said first and second structures is positioned on an extension line of said slits, and for forming protrusions exposed from the first and second structures in part of the first principal electrode film of each of the first and second structures;
and
forming wiring connection parts for connecting the protrusions of the first principal electrode with the second principal electrode for each of the first and second structures.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 10/725,627Filed 3 Dec 2003
Priority: JP 2002-3510673 Dec 2002
Published: US 2004/0136117 A115 Jul 2004
Granted: 27 Jun 2006
Term ends: Not estimatedThe source records don’t support an estimate.

Classification8 codes

G11B 5/5552
Across disk tracks: using fine positioning means for track acquisition separate from the coarse positioning means
G11B 5/4873
Specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives: the arm comprising piezoelectric or…
H10N 30/073
By laminating or bonding of piezoelectric or electrostrictive bodies: by fusion of metals or by adhesives
H10N 30/082
Shaping or machining of piezoelectric or electrostrictive bodies: by etching, e.g. lithography