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AssigneeSemrock, Inc.
InventorsGlenn Clarke, Turan Erdogan, Joseph T. Foss, Ligang Wang
Estimating the term…
Highly discriminating optical edge filters and methods of making the same are disclosed. The optical edge filters have an edge steepness greater than about 0.8% as measured by dividing (a) the edge width from the 50% transmission wavelength to the optical density 6 (“OD6”) wavelength by (b) the 50% transmission wavelength. The optical filters also have an average transmission above about 95%. The methods for making such filters accurately determine when deposition of each layer of the filter should terminate. The methods include calculating theoretical transmission data for a layer of the filter and calculating an expected deposition duration for the layer. The methods also include measuring transmission through the layer during deposition for a period less than the expected deposition duration. When the measuring period elapses, a new deposition duration is calculated based upon the theoretical transmission data and the measured transmission data, thereby providing an accurate deposition duration for the layer.
A method of manufacturing an optical filter by determining when deposition of a layer of the optical filter is to terminate, the method comprising:
A method of making an optical filter using an apparatus, the filter designed to have N layers and the method comprising:
An optical edge filter comprising a transparent substrate having a surface and alternating thin layer of materials having respectively different indices of refraction disposed overlying the surface, the materials comprising hard coating materials, and the thicknesses of the layers chosen to produce a filter edge steepness less than about 0.8%, wherein edge steepness is defined as (a) an edge width from a 50% transmission wavelength to an optical density 6 (“OD6”) wavelength divided by (b) the 50% transmission wavelength.
Dependencies are inferred from the claim text.