Method and apparatus for a reflective spatial light modulator with a flexible pedestal

An electro-mechanical system, comprising:

• a first substrate comprising a surface region;
• a plurality of electrically activated electrodes coupled to the surface region of the first substrate, the plurality of electrically activated electrodes being coupled to an electrical source to receive a first electrical signal;
• a plurality of flexible members comprising a first end coupled to the surface region of the first substrate, the members comprising a second end and a length defined between the first end and the second end;
• a base region within a first portion of the plurality of flexible members, the base region being defined from the first end to a first predetermined portion of the length of the flexible members, the base region being characterized by at least a first cross-sectional area, the first cross-sectional area being parallel to the surface region of the substrate;
• a tip region within a second portion of the plurality of flexible members, the tip region being defined from the second end to a second predetermined portion of the length of the flexible members, the tip region being characterized by at least a second cross-sectional area;
• and
• a moveable structure, coupled to the plurality of flexible members, comprising a frontside surface and a backside surface, the backside surface being coupled to the second end of the plurality of flexible members, the frontside surface being substantially parallel to the surface region while the moveable structure is in a first state and being substantially non-parallel to the surface region while the moveable structure is in a second state;
• whereupon the tip region of the plurality of flexible members moves from a first position characterized by the first state to a second position characterized by the second state upon application of a predetermined voltage bias associated with the first electrical signal, the movement of the tip region of the plurality of flexible members from the first position to the second position being constrained to lie in a plane including an axis parallel to the length of the plurality of flexible members, wherein the moveable structure tilts at an angle of 12° with respect to the first surface upon application of the predetermined voltage bias associated with the first electrical signal.

A method of manufacturing an electro-mechanical system, the method, comprising:

• depositing a first mask layer on a first surface of a handling substrate;
• etching the first surface of the handling substrate to form a plurality of flexible pedestals and a plurality of walls;
• removing the first mask layer;
• forming a plurality of electrodes on an electrode substrate;
• aligning the handling substrate and the electrode substrate;
• wafer bonding the handling substrate to the electrode substrate by making contact between the plurality of flexible pedestals and the plurality of walls;
• thinning a portion of the handling substrate by removing material from a second surface of the handling substrate;
• depositing a second mask layer on the second surface of the handling substrate;
• and
• etching the second surface of the handling substrate to remove at least a portion of the plurality of walls and form moveable structures.