Semiconductor device characteristics measurement apparatus and connection apparatus

A connection apparatus comprising:

• a first triaxial connector and a second triaxial connector that are to be connected to a device under test, which is a semiconductor device;
• a first coaxial connector, a second coaxial connector, and a third triaxial connector that are to be connected to measuring means for measuring an electrical characteristic of the device under test;
• micro-current detecting means comprising a first output, a second output, a first input, a second input, resistors connected to the first input, and a buffer amplifier for transmitting respective voltages across the resistors to the first output and the second output;
• switching means for switching between connection configurations connected to the first coaxial connector, the second coaxial connector, and the third coaxial connector;
• and
• a control input terminal that is connectable to controlling means for controlling the switching means;
• wherein, for measuring alternating current, under control of the controlling means through the control input terminal, the switching means establishes connections such that core lines of the first and second coaxial connectors are interconnected and are connected to the core line of the first triaxial connector, and outer shield conductors of the first and second coaxial connectors are interconnected and are connected to guard conductors of the first and second triaxial connectors, each guard conductor being disposed between the core line and an outer shield conductor of each triaxial connector;
• wherein, for measuring direct-current voltage current, the switching means establishes connections such that a core line of the third triaxial connector is connected to the core line of the first triaxial connector, the core line of the second triaxial connector is connected to the first output via the second input of the micro-current detecting means, and a guard connector of the third triaxial connector is connected to the guard conductors of the first and second triaxial connectors;
• and
• wherein, for measuring micro current, the switching means establishes connections such that the core line of the first triaxial connector is connected to the first input of the micro-current detecting means to cause the buffer amplifier to output the respective voltages across the resistors as first and second outputs.