System and method for the probing of a wafer
AssigneeTexas Instruments Incorporated
InventorsByron H. Gibbs, Phillip H. Ball, Adolphus E. McClanahan
Life of this patent
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Abstract
In one embodiment, a method for probing a wafer includes providing a plurality of pressure sensors on a surface of a probe card holding tray, positioning a probe card of a testhead relative to a prober supporting a wafer, engaging the probe card with the probe card holding tray, receiving a plurality of pressure signals from respective pressure sensors, and comparing the pressure signals to determine if the probe card is substantially parallel with the prober.
Claims20
A method for probing a wafer comprising:
- providing a plurality of pressure sensors on a surface of a probe card holding tray;
- positioning a probe card of a testhead relative to a prober supporting a wafer;
- engaging the probe card with the probe card holding tray;
- receiving a plurality of pressure signals from respective pressure sensors;
- and
- comparing the pressure signals to determine if the probe card is substantially parallel with the prober.
A system for probing a wafer comprising:
- a prober operable to support a wafer in a testing position;
- a testhead positioned proximate the prober, the testhead comprising a manipulator operable to adjust the position of the testhead relative to the prober;
- a plurality of pressure sensors circumferentially spaced about a probe card holding tray of the prober and operable to receive respective pressure signals identifying respective forces exerted by the testhead on the prober;
- and
- a sensor analyzer operable to compare the pressure signals to determine if the probe card is substantially parallel with the prober.
A system for probing a wafer comprising:
- means for providing a plurality of pressure sensors on a surface of a probe card holding tray;
- means for positioning a probe card of a testhead relative to a prober supporting a wafer;
- means for engaging the probe card with the probe card holding tray;
- means for receiving a plurality of pressure signals from respective pressure sensors;
- and
- means for comparing the pressure signals to determine if the probe card is substantially parallel with the prober.
Dependencies are inferred from the claim text.