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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorMasaaki Hiroki
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A detector substrate is provided adjacent to an element substrate to inspect any defect in a semiconductor element and a wiring formed on the element substrate. An electromagnetic wave is irradiated to a gas provided between the detector substrate and the element substrate to ionize the gas. An electric current between the detection substrate and the element substrate through the ionized gas is measured by an ammeter for a video signal for displaying white. Also, an electric current between the detection substrate and the element substrate through the ionized gas is measured by an ammeter for a video signal for displaying black. A ratio of these electric currents is obtained as a ratio of white and black. An element substrate having quality lower than a reference quality is removed as defective.
A device for inspecting element substrates comprising a source of electromagnetic waves and an opposing detector substrate, the source of electromagnetic waves ionizing a gas present between the opposing detector substrate and an element substrate that is to be inspected,
A method of inspecting element substrates by emitting electromagnetic waves from a source of electromagnetic waves in order to ionize a gas between an opposing detector substrate and an element substrare to be inspected,
A device for inspecting element substrates comprising a source of electromagnetic waves and an opposing detector substrate, the source of electromagnetic waves ionizing a gas present between the opposing detector substrate and an element substrate that is to be inspected,
A device for inspecting element substrates comprising a source of electromagnetic waves and an opposing detector substrate, the source of electromagnetic waves ionizing a gas present between the opposing detector substrate and an element substrate that is to be inspected,
Dependencies are inferred from the claim text.