Shinged structures for vacuum microelectronics and methods of manufacturing same
OwnerLarry Sadwick, Ruey-Jen Hwuinventors
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Abstract
An improved Klystron device is disclosed which has opposed electrostatic (ES) magnetic field generating members which are uniformly spaced along a longitudinal axis to form an electron beam chamber. The ES magnetic field generating members produce a magnetic flux which confines an electron beam passing through the chamber when an alternating current (AC) is imposed upon the magnetic field generating members. An additional improvement includes a chamber formed from a single sheet of electron conductive metal having a ladder-like structure symmetrical about a longitudinal hinge which permits the structure to be folded about the hinge to form a suitable electron beam chamber.
Claims22
A pair of self-alignable, ladder-like structures integral with one another in a single sheet of electroconductive material wherein a hinge joint is formed parallel to the rails of said ladder-like structures by folding 180° along a hinge line separating said ladder-like structures and wherein rungs of each of said ladder-like structures are sized and spaced to be aligned with one another when said hinge joint is in a closed position and to form an elongated tunnel therebetween.
A pair of ladder-like structures positioned in register with one another to form a tunnel therebetween wherein said structures are integral with one another by folding 180° along a hinge joint axis parallel to the longitudinal axis of said tunnel.
A method for fabricating a precise miniature ladder-type device of a thin malleable electroconductive sheet of material comprising:
- applying a precise mask by photolithographic techniques of the desired structure on a thin electroconductive sheet;
- etching the unmasked portions to remove precisely the unmasked portions of the sheet material to result in a ladder-like structure with precisely spaced rungs;
- forming the etched sheet along its longitudinal axis to recess the rung members from the plane of the sheet;
- and
- folding the etched sheet 180° along a hinge line onto itself to form the ladder-type device.
Dependencies are inferred from the claim text.