Piezoelectric device, cellular phone system using the piezoelectric device, and electronic equipment using the piezoelectric device
AssigneeSeiko Epson Corporation
InventorHideo Tanaya
Life of this patent
Estimating the term…
Abstract
A piezoelectric device includes a base substrate constituting the bottom of the package; a framed resonator element layered on the base substrate; and a lid for hermetically sealing a space within the package, the lid being layered on the framed resonator element. The framed resonator element includes a frame constituting a wall surrounding the space within the package; a base having a predetermined width, which is integrally formed inside the frame; a plurality of resonating arms that extend in parallel to each other from the base in one direction in the frame; first cutouts that are provided near the base ends of the resonating arms in the base; and second cutouts formed at the joint between the base and the frame.
Claims7
A piezoelectric device having a resonator element housed in a package, the piezoelectric device comprising:
- a base substrate;
- a framed resonator element on the base substrate, the resonator element having plurality of resonating arms and a surrounding frame;
- and
- a lid on the resonator element for hermetically sealing a space within the package,
- wherein the framed resonator element includes a base having a predetermined width, the base being integrally formed with inner portions of the frame;
- the plurality of resonating arms extending parallel to each other from the base;
- first cutouts in the base adjacent to inner ends of the resonating arms ,the first cutouts narrowing the width of the base;
- and second cutouts that are formed where the base joins the frame, the second cutouts narrowing the width of the base.
A piezoelectric device having a resonator element housed in a package, the piezoelectric device comprising:
- a base substrate forming a bottom of the package;
- a framed resonator element adhered on the base substrate;
- and
- a lid for housing the framed resonator element in the package to hermetically seal the package,
- wherein the framed resonator element includes a rectangular frame;
- a base having a predetermined width, which is integrally formed inside the frame;
- a plurality of resonating arms that extend in parallel to each other from the base in one direction;
- first cutouts in the base adjacent to inner ends of the resonating arms, the first cutouts narrowing the width of the base;
- and second cutouts that are formed where the base joins the frame, the second cutouts further narrowing the width of the base.
A cellular phone system comprising:
- a piezoelectric device that has a resonator element housed in a package, the piezoelectric device having a base substrate constituting the bottom of the package;
- a framed resonator element layered on the base substrate;
- and a lid for hermetically sealing a space within the package, the lid being layered on the framed resonator element, wherein the framed resonator element includes a frame constituting a wall surrounding the space within the package;
- a base having a predetermined width, which is integrally formed inside the frame;
- a plurality of resonating arms that extend in parallel to each other from the base in one direction in the frame;
- first cutouts in the base adjacent to ends of the resonating arms, the first cutouts narrowing the width of the base;
- and second cutouts that are formed where the base joins the frame, the second cutouts further narrowing the width of the base, and wherein the cellular phone system receives a clock signal for control by using the piezoelectric device.
Electronic equipment comprising:
- a piezoelectric device that has a resonator element housed in a package, the piezoelectric device having a base substrate constituting the bottom of the package;
- a framed resonator element layered on the base substrate;
- and a lid for hermetically sealing a space within the package, the lid being layered on the framed resonator element, wherein the framed resonator element includes a frame constituting a wall surrounding the space within the package;
- a base having a predetermined width, which is integrally formed inside the frame;
- a plurality of resonating arms that extend in parallel to each other from the base in one direction in the frame;
- first cutouts in the base adjacent to inner ends of the resonating arms, the first cutouts narrowing the width of the base;
- and second cutouts that are formed where the base joins the frame, the second cutouts further narrowing the width of the base, and wherein the electronic equipment receives a clock signal for control by using the piezoelectric device.
Dependencies are inferred from the claim text.