Piezoelectric/electrostrictive film device, and manufacturing method of the device

A piezoelectric/electrostrictive film device comprising:

• a substrate which is formed of ceramic;
• a piezoelectric/electrostrictive operation portion including a lower electrode, piezoelectric/electrostrictive layer, and upper electrode which are successively stacked on the substrate and including a projecting end of the piezoelectric/electrostrictive layer with which an upper surface of the lower electrode and a lower surface of the upper electrode are not coated;
• and
• a coupling member extending between said projecting end of the piezoelectric/electrostrictive layer and the substrate and being coupled to the substrate, wherein the coupling member comprises a hybrid material in which inorganic particles having an average particle diameter of 5 nm to 1 μm are scattered in a matrix of a polymer compound.

A piezoelectric/electrostrictive film device comprising:

• a substrate which is formed of ceramic;
• a piezoelectric/electrostrictive operation portion including a plurality of electrodes and a plurality of piezoelectric/electrostrictive layers which are alternately stacked on the substrate and including a projecting end of each piezoelectic/electrostrictive layer with which upper and lower surfaces of each electrode are not coated;
• and
• a coupling member extending between said projecting end of the piezoelectric/electrostrictive layer and the substrate and being coupled to the substrate, wherein the coupling member comprises a hybrid material in which silica particles are scattered in a matrix containing a polysiloxane polymer as a main component, and the electrodes are disposed in uppermost and lowermost layers in a multilayered structure of the piezoelectric/electrostrictive layers and electrodes.

A piezoelectric/electrostrictive film device comprising:

• a substrate which is formed of ceramic;
• a piezoelectric/electrostrictive operation portion including a plurality of electrodes and a plurality of piezoelectric/electrostrictive layers which are alternately stacked on the substrate and including a projecting end of each piezoelectric/electrostrictive layer with which upper and lower surfaces of each electrode are not coated;
• and
• a coupling member extending between said projecting end of the piezoelectric/electrostrictive layer and the substrate and being coupled to the substrate, wherein the coupling member comprises a hybrid material in which inorganic particles having an average particle diameter of 5 nm to 1 μm are scattered in a matrix of a polymer compound, and the electrodes are disposed in uppermost and lowermost layers in a multilayered structure of the piezoelectric/electrostrictive layers and electrodes.