Semiconductor wafer, semiconductor device, circuit board, electronic instrument, and method for manufacturing semiconductor device

A semiconductor device comprising:

• a semiconductor chip having an integrated circuit and a pad electrically connected to the integrated circuit;
• a wiring layer electrically connected to the pad and
• having a concave portion, the concave portion being formed in such a way that an angle between an osculating plane at any point of a surface of the concave portion and a top surface of the wiring layer, the angle being defined outside the concave portion, is 90° or more;
• an external terminal joined to the concave portion of the wiring layer;
• and
• a resin layer provided on the wiring layer, the resin layer having a through-hole, the through-hole and the concave portion overlapping each other, the concave portion being formed by an exposure step wherein a portion of the resin layer is irradiated with a dose of radiation to form a region with increased solubility and a development step wherein a portion of the region with increased solubility is removed to form the concave portion.

A semiconductor wafer comprising:

• a semiconductor substrate having a plurality of integrated circuits and pads electrically connected to the plurality of integrated circuits;
• a wiring layer electrically connected to the pads and having concave portions, the concave portions being formed in such a way that an angle between an osculating plane at any point of a surface of each of the concave portions and a top surface of the wiring layer, the angle being defined outside each of the concave portions, is 90° or more;
• external terminals joined to the concave portions in the wiring layer;
• and
• a resin layer provided on the wiring layer, the resin layer having through holes, the through holes and the concave portions overlapping each other, the concave portions being formed by an exposure step wherein a portion of the resin layer is irradiated with a dose of radiation to form a region with increased solubility and a development step wherein a portion of the region with increased solubility is removed to form the concave portions.