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US 7,067,862 B2Granted
Conductive memory device with conductive oxide electrodes
AssigneeUnity Semiconductor Corporation
InventorsDarrell Rinerson, Steven W. Longcor, Steve Kuo-Ren Hsia, Wayne Kinney, Edmond R. Ward, Christophe J. Chevallier
Life of this patent
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Abstract
A multi-resistive state element that uses barrier electrodes is provided. If certain materials are used as electrodes, the electrodes can be used for multiple purposes. Oxides and nitrides are especially well suited for acting as a barrier layer, and possibly even an adhesion layer and a sacrificial layer.
Claims43
A conductive memory device comprising:
- a conductive bottom electrode;
- a multi-resistive state element arranged on top of and in contact with the bottom electrode, the multi-resistive state element having a resistivity;
- and
- a conductive top electrode arranged on top of and in contact with the multi-resistive state element;
- wherein the resistivity of the multi-resistive state element may be changed by applying a first voltage having a first polarity across the conductive electrodes and reversibly changed by applying a second voltage having a second polarity across the conductive electrodes, the second polarity being opposite to the first polarity;
- and
- wherein at least one of the conductive electrodes functions as a barrier layer;
- and
- wherein at least one of the conductive electrodes comprises a conductive oxide and functions as a seed layer.
6 more elements
A conductive memory device comprising:
- a conductive bottom electrode;
- a multi-resistive state element arranged on top of and in contact with the bottom electrode, the multi-resistive state element having a resistivity;
- and
- a conductive top electrode arranged on top of and in contact with the multi-resistive state element;
- wherein the resistivity of the multi-resistive state element may be changed by applying a first voltage having a first polarity across the conductive electrodes and reversibly changed by applying a second voltage having a second polarity across the conductive electrodes;
- wherein at least one of the conductive electrodes functions as a barrier layer;
- wherein the at least one of the conductive electrodes that functions as a barrier layer includes a conductive oxide;
- and
- wherein:
- the bottom electrode is fabricated prior to the multi-resistive state element;
- the at least one of the conductive electrodes that functions as a barrier layer is the bottom electrode;
- and
- the bottom electrode functions as a seed layer to the multi-resistive state element.
10 more elements
A conductive memory device, comprising:
- a memory element that stores an adjustable resistive value;
- two electrodes that deliver current to the memory element;
- wherein at least one electrode includes a terminal layer that is suitable for connecting the electrode to either a conductive line or a transistor terminal;
- wherein the at least one electrode has an outside face that is defined by the terminal layer and an inside face opposite the outside face;
- and
- wherein the at least one electrode acts as a barrier layer;
- and
- wherein at least one electrode comprises a conductive oxide and functions as a seed layer.
5 more elements
A re-writable memory comprising:
- a substrate;
- a plurality of circuits on the substrate;
- a plurality of x-direction conductive lines oriented in one direction;
- a plurality of y-direction conductive lines in a different direction as the x-direction conductive lines, and crossing the x-direction conductive lines;
- and
- at least one memory array having memory cells located substantially at the intersections of the x-direction conductive lines and y-direction conductive lines;
- wherein each of the memory cells in the memory array includes at least one electrode that acts as a barrier layer;
- and
- wherein each of the memory cells in the memory array includes at least one electrode and the at least one electrode comprises a conductive oxide and functions as a seed layer to at least a portion of the memory cell.
6 more elements
Dependencies are inferred from the claim text.