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US 7,067,857 B2Granted
Semiconductor device having led out conductor layers, manufacturing method of the same, and semiconductor module
AssigneeHitachi, Ltd.
InventorsKazuhiro Mochizuki, Isao Ohbu, Tomonori Tanoue, Chisaki Takubo, Kenichi Tanaka
Life of this patent
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Abstract
The gist of the present invention is as follows: In a monolithic microwave integrate circuit (MMIC) using a heterojunction bipolar transistor (HBT), via holes are respectively formed from the bottom of the MMIC for the emitter, base and collector. Of the via holes, one is located so as to face the HBT. The respective topside electrodes for the other via holes located so as not to face the HBT are provided in contact with the MMIC substrate.
Claims5
A semiconductor device, comprising:
- a semiconductor substrate, and
- at least one semiconductor element formed on the semiconductor substrate;
- wherein conductor layers connected respectively to desired areas of the semiconductor element are led out of the semiconductor element from a surface of the semiconductor substrate opposite to the other surface on which the semiconductor element is formed;
- wherein the semiconductor element is a heterojunction bipolar transistor and the conductor layers connected respectively to a base area, an emitter area and a collector area of the heterojunction bipolar transistor are led out from the surface of the semiconductor substrate opposite to the other surface on which the base, emitter and collector areas are formed;
- wherein the bottom surface of the semiconductor substrate has a first opening located so as to face the heterojunction bipolar transistor, and a second opening and a third opening both located so as not to face the heterojunction bipolar transistor;
- and
- wherein the conductor layers connected respectively to the base, emitter and collector areas of the heterojunction bipolar transistor are led out of the heterojunction bipolar transistor through the first, second and third openings.
4 more elements
Dependencies are inferred from the claim text.