Power sag detection and control in ion implanting system

A system for regulating fluctuations in power supplied to an ion implanter during implantation of ions in a substrate, comprising

• a sensor module for monitoring power supplied to the implanter and at least one other operational parameter thereof,
• a power regulating system in communication with the sensor module for detecting a power fluctuation that can adversely affect operation of the implanter, the regulating system deactivating an ion source of the implanter upon detection of a power fluctuation and reactivating the ion source upon termination of the fluctuation when the other operational parameter returns to an acceptable value.

A system for managing power supplied to a semiconductor processing apparatus, comprising:

• a sensor module for monitoring power supplied to the apparatus and at least one other operational parameter thereof, and
• a power regulating module in communication with said sensor module for detecting a power fluctuation event during a semiconductor processing session, said power regulating module interrupting said power processing session upon detection of a power fluctuation event and resuming said session upon termination of said power fluctuation event when said at least one operational parameter is within an acceptable range.