Micro-sample pick-up apparatus and micro-sample pick-up method
AssigneeSII NanoTechnology Inc.
InventorsKouji Iwasaki, Yo Yamamoto
Life of this patent
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Abstract
A micro-sample pick-up apparatus has a probe for picking up a micro sample, a probe holder for holding the probe, an XYZ driver mechanism for moving the probe holder in the three-dimensional directions of X, Y and Z, and an observation mechanism for observing the sample and the probe. A low-vibration rotary mechanism disposed in the probe holder for rotating the probe about an axis of the probe.
Claims19
A micro-sample pick-up apparatus for picking up a micro sample cut out from a sample and provided in a microscope system, the micro-sample pick-up apparatus comprising:
- a probe for picking up the sample;
- a probe holder for holding the probe;
- an XYZ driver mechanism for moving the probe holder in the three-dimensional directions of X, Y and Z;
- an observation mechanism for observing the sample and the probe;
- and
- a low-vibration rotary mechanism disposed in the probe holder for rotating the probe about an axis of the probe.
A micro-sample pick-up apparatus comprising:
- a probe for picking up a micro sample;
- a probe holder for holding the probe so that the probe extends from a tip of the probe holder;
- a driver mechanism for moving the probe holder in three-dimensional directions;
- and
- rotary means for rotating the probe about a longitudinal axis thereof by rotating only the tip of the probe holder.
A micro-sample pick-up apparatus for picking up a micro sample and correcting a rotational direction of the micro sample, the micro-sample pick-up apparatus comprising:
- a probe for picking up a micro sample;
- a probe holder for holding the probe so that the probe extends from a tip of the probe holder;
- a driver mechanism for moving the probe holder in three-dimensional directions;
- and
- rotary means for rotating the probe about a longitudinal axis thereof by rotating only the tip of the probe holder to thereby correct a rotational direction of the micro sample without substantially vibrating the micro sample.
Dependencies are inferred from the claim text.