Vacuum ultraviolet reflectometer system and method

A reflectometer which operates below deep ultra-violet (DUV) wavelengths, the reflectometer comprising:

• a light source that creates light including wavelengths below DUV wavelengths, the light being utilized to create at least one light beam in the reflectometer;
• a plurality of environmentally controlled chambers in which the light beam travels, the chambers sufficiently controlled to allow transmission of light wavelengths below DUV, at least one of the chambers being a sample chamber configured to hold a sample from which reflectance data is desired to be collected;
• a spectrometer that receives at least a portion of the light beam and provides at least a portion of the light beam as a spectrometer output;
• and
• a detector that receives the spectrometer output, the detector detecting data for wavelengths at or below DUV wavelengths.

A method of collecting reflectance data from a sample utilizing a reflectometer, including collecting reflectance data for wavelengths below deep ultra-violet (DUV) wavelengths, the method comprising:

• creating light wavelengths below DUV wavelengths, the light being utilized to create at least one light beam in the reflectometer;
• transmitting the light beam in at least one environmentally controlled chamber;
• controlling the environment within the at least one environmentally controlled chamber to allow transmission of wavelengths below DUV light;
• directing the light beam on a sample;
• receiving at least a portion of the light beam within a spectrometer after the light beam has been reflected from the sample;
• providing multiple spatially separated wavelengths of light at an exit plane of the spectrometer, the multiple spatially separated wavelengths of light including wavelengths of light below DUV wavelengths;
• and
• receiving the multiple spatially separated wavelengths of light with an array dectector, the array detector detecting data for wavelengths below DUV wavelengths in order to collect sample reflectance data for wavelengths below deep ultra-violet (DUV) wavelengths.

An optical reflectometer for obtaining reflectance data from a two-dimensional sample area, the reflectometer comprising:

• a light source providing a light beam;
• a plurality of optical elements configured to direct the light beam to and from a two-dimensional sample area;
• a spectrometer that receives the light beam, the spectrometer providing multiple spatially separated wavelengths of light at an exit of the spectrometer;
• and
• an array detector that receives the multiple spatially separated wavelengths of light to enable reflectance data to be simultaneously obtained for multiple sites within the two-dimensional sample area,
• wherein the array detector detects and resolves reflectance data wavelengths of light below DUV wavelengths.

A method of analyzing the reflectance characteristics of a sample utilizing a reflectometer, the method comprising:

• providing at least one light beam;
• directing the light beam on a two-dimensional area of a sample;
• receiving at least a portion of the light beam within an imaging spectrometer after the light beam has been reflected from the sample;
• providing multiple spatially separated wavelengths of light at an exit plane of the spectrometer;
• and
• receiving the multiple spatially separated wavelengths of light with a two-dimensional array detector in order to allow reflectance data to be simultaneously obtained for multiple sites within the two-dimensional area of the sample,
• wherein the reflectance data resolved by the array detector includes data for wavelengths below DUV.