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US 7,067,800 B2Granted
Method for measuring the concentration of impurities in nitrogen, hydrogen and oxygen by ion mobility spectrometry
AssigneeSaes Getters S.P.A.
InventorsLuca Pusterla, Marco Succi, Antonio Bonucci, Robert Stimac
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Abstract
A method for the quantitative analysis of the impurities content in nitrogen, hydrogen or oxygen by means of ion mobility spectrometry is described. The method involves using pure argon or a mixture, having no impurities, containing argon and the gas to be analyzed, as a counterflow gas in the separation zone of the ion mobility spectrometer.
Claims3
A method for measuring a concentration of impurities in a gas to be analyzed selected from the group consisting of hydrogen and oxygen using ion mobility spectrometry;
- the method comprising employing as a counterflow gas in a separation zone of an ion mobility spectrometer pure argon or a mixture of argon and the gas to be analyzed, wherein the mixture contains no impurities and is an argon/hydrogen or argon/oxygen mixture comprising at least 50% by volume of argon based on a total volume of the mixture;
- and:
- (a) when the gas to be analyzed is hydrogen, a ratio between a flow rate of argon or the argon/hydrogen mixture and a flow rate of the hydrogen is at least 10;
- or
- (b) when the gas to be analyzed is oxygen, a ratio between a flow rate of argon or the argon/oxygen mixture and a flow rate of the oxygen is between 0.3 and 1.5 or between 6 and 10.
2 more elements
Dependencies are inferred from the claim text.