Method and device for producing X-ray image detector, and X-ray image detector
AssigneeKabushiki Kaisha Toshiba
InventorShirofumi Yamagishi
Life of this patent
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Abstract
An X-ray light emitting phosphor film (22) such as a CsI film that converts an X-ray to light is formed on an input substrate (21) constituting an input part of an X-ray image detector. A surface portion of the X-ray light emitting phosphor film (22) is irradiated with high-energy light having a wavelength of 500 nm or less. The surface portion of the X-ray light emitting phosphor film (22) is locally sublimated and/or fused to be flattened by the irradiation with the high-energy light. The use of the high-energy light such as a laser beam makes it possible to efficiently and uniformly flatten the surface portion of the X-ray light emitting phosphor film.
Claims12
A method for producing an X-ray image detector, comprising:
- forming an X-ray light emitting phosphor film that converts an X-ray to light, on an input substrate constituting an input part of the X-ray image detector;
- and
- irradiating the X-ray light emitting phosphor film with high-energy light having a wavelength of 500 nm or less to flatten a surface portion of the X-ray light emitting phosphor film by sublimation and/or fusion.
A device for producing an X-ray image detector, comprising:
- a high-energy light generating source configured to irradiate an X-ray light emitting phosphor film with high-energy light having a wavelength of 500 nm or less, the X-ray light emitting phosphor film being formed on an input substrate constituting an input part of the X-ray image detector;
- and
- a mechanism configured to move the input substrate on which the X-ray light emitting phosphor film is formed, in an irradiation direction of the high-energy light and a direction orthogonal to the irradiation direction.
An X-ray image detector comprising:
- a vacuum envelope;
- an input part provided on one end portion side of said vacuum envelope and having an X-ray light emitting phosphor film, a transparent conductive film, and a photoelectric surface that are formed in sequence on an input substrate, said input part being configured to convert an incident X-ray image to a photoelectron image;
- and
- an output part provided on the other end portion side of said vacuum envelope and configured to convert the photoelectron image to a visible light image to output the visible light image,
- wherein the X-ray light emitting phosphor film has a surface that has been flattened by irradiation with high-energy light, and a pitch x[μm] of irradiation traces of the high-energy light has a value satisfying x≦1.48×108/y, where x[μm] is the pitch of the irradiation traces of the high-energy light and y is the number of pixels of an imaging part or a display part of the visible light image outputted from said output part.
Dependencies are inferred from the claim text.