Electron-emitting device, electron source and image-forming apparatus, and manufacturing methods thereof
AssigneeCanon Kabushiki Kaisha
InventorsMasafumi Kyogaku, Hironobu Mizuno, Takeo Tsukamoto, Hiroyuki Hashimoto, Koki Nukanobu
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Abstract
An electron-emitting device having favorable electron emitting characteristic stable for a long time, which is manufactured by a method comprising the steps of disposing an electrically conductive member having a second gap on a substrate, and applying a voltage to the electrically conductive member while irradiating at least the second gap with an electron beam from electron emitting means disposed apart from the electrically conductive member in an atmosphere comprising a carbon compound.
Claims15
A manufacturing method of an electron-emitting device comprising the steps of:
- disposing an electrically conductive member having a gap on a substrate;
- and
- applying a voltage to said electrically conductive member while irradiating at least said gap with an electron beam from electron emitting means disposed apart from said electrically conductive member in an atmosphere comprising a carbon compound.
A manufacturing method of an electron-emitting device comprising the steps of:
- disposing first and second electrically conductive members on a substrate with a gap interposed;
- and
- applying a voltage to said first and second electrically conductive members while irradiating at least said gap with an electron beam from electron emitting means disposed apart from said electrically conductive members in an atmosphere comprising a carbon compound.
A manufacturing method of an electron-emitting device comprising the steps of:
- disposing an electrically conductive member having a gap on a substrate;
- and
- irradiating at least said gap with an electron beam from electron emitting means disposed apart from said electrically conductive member in an atmosphere comprising a carbon compound within a period where a voltage is applied to said electrically conductive member.
A manufacturing method of an electron-emitting device comprising the steps of:
- disposing first and second electrically conductive members on a substrate with a gap interposed;
- and
- irradiating at least said gap with an electron beam from electron emitting means disposed apart from said electrically conductive members in an atmosphere comprising a carbon compound within a period where a voltage is applied to said first and second electrically conductive members.
A manufacturing method of an electron-emitting device, comprising the steps of:
- disposing a first electrically conductive member and a second electrically conductive member so as to form a gap therebetween, on a substrate;
- irradiating at least said gap with an electron beam from electron emitting means disposed apart from said first and second electrically conductive members, within an atmosphere containing a carbon compound;
- and
- applying a voltage to said first and second electrically conductive members.
A manufacturing method of an electron-emitting device, comprising the steps of:
- disposing an electrically conductive member having a gap, on a substrate;
- irradiating at least said gap with an electron beam from electron emitting means disposed apart from said electrically conductive member, within an atmosphere containing a carbon compound;
- and
- applying a voltage to said electrically conductive member.
A manufacturing method of an electron-emitting device, comprising the steps of:
- disposing a first electrically conductive member and a second electrically conductive member so as to form a gap therebetween, on a substrate;
- irradiating at least said gap with an electron beam from electron emitting means disposed apart from said first and second electrically conductive members, within an atmosphere containing a carbon compound;
- and
- applying a voltage to said first and second electrically conductive members, within the atmosphere containing the carbon compound.
A manufacturing method of an electron-emitting device, comprising the steps of:
- disposing an electrically conductive member having a gap, on a substrate;
- irradiating at least said gap with an electron beam from electron emitting means disposed apart from said electrically conductive member, within an atmosphere containing a carbon compound;
- and
- applying a voltage to said electrically conductive member, within the atmosphere containing the carbon compound.
Dependencies are inferred from the claim text.