Micro electrical mechanical systems
AssigneeCSEM Centre Suisse d'Electronique et de Microtechnique SA
InventorsSamuel Obi, Michael Gale
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Abstract
A method for fabricating optical MEMS (optical Micro-Electro-Mechanical Systems or Micro-Opto-Electro-Mechanical Systems (MOEMS)) is described. The basic process involves deposition and patterning of a sacrificial spacer layer and a combined molding and photolithography step. The method described allows the fabrication of micromechanical elements incorporating micro-optical structures such as lenses (diffractive or refractive), gratings (for polarizers or resonant filters), waveguides or other micro-optical relief structures fabricated by UV-curing replication processes.
Claims18
A method of fabricating micro electro mechanical systems (MEMS) comprising the steps of;
- forming a patterned sacrificial layer including an aperture on a substrate,
- dispensing a UV-curable casting material on the sacrificial layer including the aperture,
- moulding the casting material to form a desired three-dimensional structure,
- curing the moulded structure, and
- removing the sacrificial layer and any uncured casting material.
Dependencies are inferred from the claim text.