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US 7,067,238 B2Granted
Method for manufacturing a substrate for use in a stamper manufacturing process, as well as a substrate obtained by using such a method
AssigneeSingulus Mastering B.V.
InventorsChristian Etienne Hendriks, Roland Anthony Tacken
Life of this patent
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Abstract
A method for manufacturing a substrate for use in a stamper manufacturing process and a substrate which is used in stamper manufacturing process to be used in producing optical discs, includes exposing, developing and heating of a photosensitive film that has been coated onto a substrate.
Claims21
A method for manufacturing a substrate for use in a stamper manufacturing process, comprising:
- a) coating a crosslinkable chemical composition onto the substrate to form an undercoating;
- b) subjecting the undercoating applied in a) to a crosslinking reaction;
- and
- c) applying a top coating of a photosensitive material with a predetermined thickness to the undercoating that has been crosslinked in b), which top coating is exposed and developed in the stamper manufacturing process after which posts having a desired height being less than the predetermined thickness of the top coating remain,
- wherein the thickness of the crosslinked undercoating of b) is selected so that a maximum energy intensity during exposure in the stamper manufacturing process occurs in the top coating at the desired height of the posts.
2 more elements
Dependencies are inferred from the claim text.