Substrate table, production method therefor and plasma treating device
AssigneeTokyo Electron Limited
InventorsShinji Muto, Chihiro Taguchi, Nobuyuki Okayama
Life of this patent
Estimating the term…
Abstract
The susceptor (10) of a plasma treating device, or the electrostatic chuck (12) of a substrate table is formed by ceramic thermal spray method. A ceramic spray layer (12A) is pore-sealed by methacrylic resin (12D). Resin raw material mainly containing methyl methacrylate is applied to and impregnated into the ceramic spray layer and then is cured to thereby fill pores between ceramic particles in the ceramic spray layer with methacrylic resin. Methacrylic resin raw material solution, which does not produce pores at curing, can complete perfect pore sealing.
Claims10
A method for manufacturing a substrate table, comprising the steps of:
- preparing a table main body;
- and
- forming on the table main body an electrostatic chuck layer made of a ceramic layer incorporating therein an electrode layer, the step of forming the electrostatic chuck layer including the steps of:
- heating the table main body up to a predetermined temperature;
- and then
- forming the ceramic layer by thermally spraying a ceramic material while heating the table main body,
- wherein a gas channel for supplying a gas to a substrate is formed in the table main body and, at the step of forming the ceramic layer by thermal spraying, the thermal spraying is performed while ejecting a pressurized air from the gas channel, allowing a gas channel communicating with the gas channel in the table main body to be formed in the thermally sprayed ceramic layer.
A method for manufacturing a substrate table, comprising the steps of:
- preparing a table main body;
- forming on the table main body an electrostatic chuck layer made of a ceramic layer incorporating therein an electrode layer, the step of forming the electrostatic chuck layer including the step of forming the ceramic layer by thermally spraying a ceramic material while the table main body is heated,
- wherein a gas channel for supplying a gas to a substrate is formed in the table main body and, at the step of forming the ceramic layer by thermal spraying, the thermal spraying is performed while ejecting a pressurized air from the gas channel, allowing a gas channel communicating with the gas channel in the table main body to be formed in the thermally sprayed ceramic layer.
Dependencies are inferred from the claim text.