Silane composition, silicon film forming method and solar cell production method
AssigneeJsr Corporation
InventorsHiroshi Shiho, Hitoshi Kato
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Abstract
A silane composition for preparing a semiconductor thin films of a solar cell is disclosed. The silane composition contains a polysilane compound represented by the formula SinRm (n is an integer of 3 or more, m is an integer of n to (2n+2) and an m number of R's are each independently a hydrogen atom, alkyl group, phenyl group or halogen atom, with the proviso that when all the m number of R's are hydrogen atoms and m=2n, n is an integer of 7 or more), and at least one silane compound selected from cyclopentasilane, cyclohexasilane and silylcyclopentasilane.
Claims19
A silane composition comprising:
- (A) a polysilane compound represented by the formula SinRm, wherein n is an integer of 3 or more, m is an integer of n to (2n+2) and an m number of R's are each independently a hydrogen atom, alkyl group, phenyl group or halogen atom, with the proviso that when all the m number of R's are hydrogen atoms and m=2n, n is an integer of 7 or more;
- (B) at least one silane compound selected from the group consisting of cyclopentasilane, cyclohexasilane and silylcyclopentasilane;
- and
- (C) silicon particles.
A silane composition comprising:
- (A′) a polysilane compound which is a product formed from at least one silane compound selected from the group consisting of a hydrogenated chain silane compound represented by the formula SiiH2i+2, wherein i is an integer of 2 to 8;
- a hydrogenated cyclic silane compound represented by the formula SijH2, wherein j is an integer of 3 to 10;
- Si4H4 and a hydrogenated cage silane compound represented by the formula SikHk, wherein k is 6, 8 or 10 upon photo irradiation,
- (B) at least one silane compound selected from the group consisting of cyclopentasilane, cyclohexasilane and silylcyclopentasilane, and
- (C) silicon particles.
A silane composition comprising:
- (A) a polysilane compound represented by the formula SinRm, wherein n is an integer of 3 or more, m is an integer of n to (2n+2), and an m number of R's are each independently a hydrogen atom, alkyl group, phenyl group or halogen atom, with the proviso that when all the m number of R's are hydrogen atoms and m=2n, n is an integer of 7 or more;
- (B) at least one silane compound selected from the group consisting of cyclopentasilane, cyclohexasilane and silylcyclopentasilane;
- (C) silicon particles;
- and
- (D) at least one compound selected from the group consisting of a boron compound, arsenic compound, phosphorus compound, antimony compound and modified silane compound represented by the formula SiaXbYc, wherein X is a hydrogen atom or halogen atom, Y is a boron atom or phosphorus atom, a is an integer of 3 or more, b is an integer from 1 to a, and c is an integer from a to (2a+b+2).
A silane composition comprising:
- (A′) a polysilane compound which is a product formed from at least one silane compound selected from the group consisting of a hydrogenated chain silane compound represented by the formula SiiH2i+2, wherein i is an integer of 2 to 8;
- a hydrogenated cyclic silane compound represented by the formula SijH2j, wherein j is an integer of 3 to 10;
- Si4H4 and a hydrogenated cage silane compound represented by the formula SikHk, wherein k is 6, 8 or 10upon photo irradation;
- (B) at least one silane compound selected from the group consisting of cyclopentasilane, cyclohexasilane and silylcyclopentasilane;
- (C) silicon particles;
- and
- (D) at least one compound selected from the group consisting of a boron compound, arsenic compound, phosphorus compound, antimony compound and modified silane compound represented by the formula SiaXbYc, wherein X is a hydrogen atom or halogen atom, Y is a boron atom or phosphorus atom, a is an integer of 3 or more, b is an integer from 1 to a, and c is an integer from a to (2a+b+2).
Dependencies are inferred from the claim text.