Method and apparatus for sealing electrical contacts during an electrochemical deposition process

An apparatus for securing a substrate in a processing system, comprising:

• a support ring adapted to receive the substrate, the support ring having an annular ring extending from a surface thereof;
• a thrust plate assembly adapted to exert a securing force on the substrate to secure the substrate to the support ring;
• a plurality of electrical contacts adapted to engage the substrate;
• a first sealing member attached to the thrust plate assembly, wherein the first sealing member is adapted to exert a sealing force against the annular ring, wherein the sealing force is directed substantially radially inward towards a center of the support ring;
• and
• a second sealing member attached to the support ring, the second sealing member adapted to engage a plating surface of the substrate.

An apparatus for securing a substrate in a processing system, wherein the substrate includes a plating side, a back side, and an edge, comprising:

• a substrate support member adapted to receive the substrate;
• a thrust plate assembly adapted to exert a securing force on the substrate to secure the substrate to the substrate support member;
• a plurality of electrical contacts adapted to electrically contact the back side of the substrate;
• and
• a sealing member attached to the substrate support member adapted to engage the front side of the substrate, wherein the sealing member is adapted to prevent a fluid disposed on the front side of the substrate from contacting the edge and the back side of the substrate.

An apparatus for securing a substrate in a processing system, wherein the substrate includes a plating side, a back side, and an edge, comprising:

• a substrate support member adapted to receive the substrate;
• a thrust plate assembly adapted to exert a securing force on the substrate to secure the substrate to the substrate support member;
• a plurality of electrical contacts adapted to electrically contact the back side of the substrate;
• a first sealing member attached to the substrate support member adapted to engage the front side of the substrate;
• and
• a second sealing member adapted to engage the back side of the substrate radially outward from the electrical contacts.