Method of manufacturing a fixed abrasive material
AssigneeDow Global Technologies LLC
InventorsSudhakar Balijepalli, Dale J. Aldrich, Laura A. Grier, Bedri Erdem, Gregory F. Meyers
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Abstract
Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/m3 to 1200 kg/m3.
Claims26
A method of forming a fixed abrasive material comprising:
- forming an aqueous dispersion, the aqueous dispersion including
- at least one of a polymer and a polymer forming mixture,
- abrasive particles, and
- a surfactant;
- injecting a frothing agent into the aqueous dispersion;
- mechanically frothing the aqueous dispersion and the frothing agent to form a substantially uniform froth;
- curing the froth to form an open cell foam having interconnected cells and a polymer matrix wherein the abrasive particles are distributed substantially uniformly throughout the polymer matrix.
A method of forming a fixed abrasive polishing pad comprising:
- forming an aqueous dispersion, the aqueous dispersion including
- at least one of a polymer and a polymer forming mixture,
- abrasive particles, the abrasive particles having an average particle size of less than about 2 μm, and
- a surfactant;
- injecting a frothing agent into the aqueous dispersion;
- mechanically frothing the aqueous dispersion and the frothing agent to form a substantially uniform froth;
- applying a layer of the froth to a substrate material;
- curing the layer of the forth to form a layer of open cell foam comprising interconnected cells and a polymer matrix wherein the abrasive particles are distributed substantially uniformly throughout the polymer matrix.
Dependencies are inferred from the claim text.