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US 7,066,583 B2Granted
Film forming apparatus and method of driving same, device manufacturing method, device manufacturing apparatus, and device
AssigneeSeiko Epson Corporation
InventorTakahiro Usui
Life of this patent
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Abstract
A film forming apparatus and a method of driving this apparatus control vibrations imparted to a liquid by a discharge waveform (a first signal) that causes liquid drops to be discharged and by a micro vibration waveform (a second signal) that does not cause liquid drops to be discharged and that also imparts a shear rate to the liquid that lowers the viscosity of the liquid.
Claims5
A method of driving a film forming apparatus that discharges liquid drops by imparting vibrations to a liquid, comprising the steps of
- controlling the vibrations by:
- a first signal that causes liquid drops to be discharged;
- and
- a second signal that does not cause liquid drops to be discharged and that imparts a shear rate to the liquid that lowers a viscosity of the liquid,
- wherein the liquid is a non-newtonian, pseudoplastic fluid body, and
- the second signal is not transmitted if the length of a time interval between a time when the first signal is transmitted and a time when the first signal is transmitted again is shorter than a predetermined length of time.
3 more elements
Dependencies are inferred from the claim text.