Microvalve for controlling fluid flow
AssigneeThe Procter & Gamble Company
InventorsFaiz Feisal Sherman, Vladimir Gartstein, Daniel Jonathan Quiram
Life of this patent
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Abstract
A microvalve for controlling fluid flow, including a body portion having a plurality of spaced openings formed therein, a shutter located adjacent to and substantially parallel with the body portion having a plurality of spaced openings formed therein, a drive mechanism for causing the shutter to move laterally with respect to the body portion so that the spaced openings of the shutter are brought into and out of alignment with the spaced openings of the body portion, wherein the microvalve is in an open position and a closed position, respectively, and, a latching mechanism for preventing the shutter from moving laterally with respect to the body portion.
Claims13
A method of fabricating an electrostatic microvalve, comprising the following steps:
- (a) providing a first wafer having a top surface and a bottom surface;
- (b) providing a masking material on said top surface of said first wafer;
- (c) providing a second wafer having a top surface and a bottom surface;
- (d) etching a plurality of spaced openings on said top surface of said second wafer;
- (e) bonding said bottom surface of said first wafer to said top surface of said second wafer via a sacrificial layer;
- (f) etching said masking material of said first wafer to create a shutter and a plurality of actuators operative therewith;
- (g) etching a portion of said second wafer to provide a latch for said shutter;
- (h) etching a portion of said second wafer so as to create a passage in flow communication with said spaced openings etched on said top surface thereof;
- and
- (i) removing a portion of said sacrificial layer between said first and second wafers to release said actuators.
Dependencies are inferred from the claim text.