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US 7,066,191 B2Granted
Installation for making available highly pure fine chemicals
AssigneeKinetics Germany GmbH
InventorsTodd Graves, Martin Vondran, Martin Benzinger
Life of this patent
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Abstract
A system and method for providing process chemicals. The system includes a housing comprising a functional component positioned in a first compartment, a control module positioned in a second compartment and at least one connecting line positioned in a third compartment. At least one compartment is positioned in a defined location in the housing. Modules may be removable received in their respective compartments.
Claims28
A method of providing process chemicals, comprising:
- providing a housing comprising a first compartment, a second compartment, and a third compartment, wherein the first compartment is constructed and arranged to removably receive a functional module, and wherein the third compartment extends to each sidewall of the housing;
- and
- providing a functional module selected from a plurality of functional modules dimensioned to be interchangeably received within the first compartment, the plurality of functional modules including:
- a maintenance module;
- a sample drawing module;
- an analytical module;
- a humidifier module;
- a tank module;
- a DI module;
- a mixing module;
- a mixing tank module;
- a sensor module;
- a single pump module;
- a double pump module;
- a single filter module;
- and a double filter module.
13 more elements
A system for providing process chemicals, comprising:
- a housing comprising:
- a first compartment;
- a second compartment;
- and
- a third compartment, the third compartment extending to each sidewall of the housing,
- wherein the first compartment is constructed and arranged to removably receive any one of a plurality of functional modules including:
- a maintenance module;
- a sample drawing module;
- an analytical module;
- a humidifier module;
- a tank module;
- a DI module;
- a mixing module;
- a mixing tank module;
- a sensor module;
- a single pump module;
- a double pump module;
- a single filter module;
- and a double filter module, wherein each of the functional modules is dimensioned so as to be interchangeable with one another.
16 more elements
A system for providing process chemicals, comprising:
- a first housing comprising a first compartment, a second compartment, and a third compartment;
- a functional module selected from a plurality of functional modules dimensioned so as to be interchangeably received in the first compartment;
- a control module received in the second compartment;
- and
- at least one connecting line positioned in the third compartment,
- wherein each of the first, second, and third compartments is positioned in a defined location in the first housing,
- wherein the third compartment houses only the at least one connecting line, and
- wherein a location of a module within each of the first and second compartments identifies whether the module is a functional module or a control module.
5 more elements
Dependencies are inferred from the claim text.