US 7,066,107 B2 · Shielding system for plasma chamber

Abstract

A shield system for use in a plasma chamber, such as a source chamber for an ion implantation machine, including a top shield plate configured to be attached with a top interior surface of the plasma chamber; a bottom shield plate configured to be attached with a bottom interior surface of the plasma chamber; and a rear shield plate configured to be attached with a rear interior surface of the plasma chamber, wherein a rear edge of the top shield plate meets a top edge of the rear shield plate, and wherein a rear edge of the bottom shield plate meets a bottom edge of the rear shield plate, such that the top shield plate, the bottom shield plate and the rear shield plate fit together to substantially cover the chamber's interior surfaces, thus reducing depositions on the inside surfaces of the plasma chamber, while the plasma chamber is operating.

Claims13

Dependent claims

A shield system for use in a plasma chamber, comprising:

a top shield plate configured to be attached with a top interior surface of the plasma chamber;
a bottom shield plate configured to be attached with a bottom interior surface of the plasma chamber;
a rear shield plate configured to be attached with a rear interior surface of the plasma chamber,
wherein a rear edge of said top shield plate meets a top edge of said rear shield plate, and wherein a rear edge of said bottom shield plate meets a bottom edge of said rear shield plate, such that said top shield plate, said bottom shield plate and said rear shield plate fit together to substantially cover the chamber's interior surfaces, thus reducing depositions on the inside surfaces of the plasma chamber, while the plasma chamber is operating;
and
a top extension shield plate, said top extension shield plate having an edge substantially equal in size to an edge of said top shield plate, said top extension shield plate having a groove along said edge of said top extension shield plate,
said top shield plate further comprising a tongue along said edge of said top shield plate,
wherein said groove of said top extension shield plate is configured to engage said tongue of said top shield plate.

5 more elements

A shield system for use in a source chamber of an ion implantation tool, comprising:

a top shield plate configured to be attached with a top interior surface of the source chamber;
a bottom shield plate configured to be attached with a bottom interior surface of the source chamber;
a rear shield plate configured to be attached with a rear interior surface of the source chamber,
wherein a rear edge of said top shield plate meets a top edge of said rear shield plate, and wherein a rear edge of said bottom shield plate meets a bottom edge of said rear shield plate, such that said top shield plate, said bottom shield plate and said rear shield plate fit together to substantially cover the chamber's interior surfaces, thus reducing depositions on the inside surfaces of the source chamber, while the source chamber is operating,
wherein said top shield plate comprises a substantially flat planar portion and further comprises structural members configured to fit over members projecting from the top interior surface of the plasma chamber, thus enabling said substantially flat planar portion of said top shield plate to fit adjacent to said top interior surface of the source chamber,
wherein said rear shield plate comprises an aperture aligned with an aperture of said source chamber for the egress of ions from said chamber;
a flange shield having a shape substantially similar to a flange surrounding the source chamber vacuum pump, said flange shield configured to couple with the flange so as to extend the flange and thus reduce depositions near the vacuum pumps in the source chamber;
and
a top extension shield plate, said top extension shield plate having an edge substantially equal in size to an edge of said top shield plate, said top extension shield plate having a groove along said edge of said top extension shield plate,
said top shield plate further comprising a tongue along said edge of said top shield plate,
wherein said groove of said top extension shield plate is configured to engage said tongue of said top shield plate.

8 more elements

Dependencies are inferred from the claim text.

Shielding system for plasma chamber

Life of this patent

Shielding system for plasma chamber

Life of this patent

Abstract

Claims13